2010
DOI: 10.1016/j.tsf.2010.08.114
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Electrical properties of metal-oxide-semiconductor capacitors using liquid-phase deposited silicon-dioxide gate dielectric on sulfur-passivated germanium

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Cited by 3 publications
(1 citation statement)
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“…[11][12][13] But at the same time, a large amount of fixed charge was introduced at the interface, which caused flat band voltage (V FB ) shifting that has not been systematically investigated yet. 6,[14][15][16] Fixed charges of high density would cause lower mobility by strong coulombic scattering and shift of the threshold voltage. 17,18 High temperature (450 C) oxygen annealing was tried to improve the performance of metal-oxide-semiconductor (MOS) capacitor.…”
Section: CMmentioning
confidence: 99%
“…[11][12][13] But at the same time, a large amount of fixed charge was introduced at the interface, which caused flat band voltage (V FB ) shifting that has not been systematically investigated yet. 6,[14][15][16] Fixed charges of high density would cause lower mobility by strong coulombic scattering and shift of the threshold voltage. 17,18 High temperature (450 C) oxygen annealing was tried to improve the performance of metal-oxide-semiconductor (MOS) capacitor.…”
Section: CMmentioning
confidence: 99%