2012
DOI: 10.1109/tvlsi.2010.2090049
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Electrical Characterization for Intertier Connections and Timing Analysis for 3-D ICs

Abstract: Reducing interconnect delay and power consumption has become a major concern in deep submicron designs. 3-D technologies have been proposed as a promising solution to mitigate interconnect problems. This paper examines the electrical characterization of vertical intertier connections such as through silicon via (TSV) and microbumps considering process variations and studies their timing impact on the circuit level. We first provide parasitic RC characteristics of intertier connections including TSV and microbu… Show more

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Cited by 39 publications
(18 citation statements)
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“…[95][96][97] The equivalent TSV self-capacitance is an important parameter for RC delay, which needs to be considered during TSV design. The equivalent TSV inductance is also important for interconnect performance such as SSN that is determined by TSV length.…”
Section: Temperature Distribution and Thermal Stressesmentioning
confidence: 99%
“…[95][96][97] The equivalent TSV self-capacitance is an important parameter for RC delay, which needs to be considered during TSV design. The equivalent TSV inductance is also important for interconnect performance such as SSN that is determined by TSV length.…”
Section: Temperature Distribution and Thermal Stressesmentioning
confidence: 99%
“…Additionally, in the most commonly used face-to-back (F2B) bonding technology, TSVs must tunnel through the substrate of one tier [21]. Under the current technology, TSVs are usually much larger than the vias in the metal layers, so they should be placed in the whitespace between the modules in the device layer.…”
Section: B Our Motivationmentioning
confidence: 99%
“…The TSV model we adopt is shown in Figure 2 [23]. R t and C t represent the parasitic resistance and capacitance of one P/G TSV respectively.…”
Section: A Modeling Of 3d Power Delivery Networkmentioning
confidence: 99%
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“…However the physical limits restrict the reduction of transistor size [1]. And there are problems of delay, power and parasitic effects as technology develops.…”
Section: Introductionmentioning
confidence: 99%