Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition

Abstract

Amorphous carbon pillars grown by focused ion beam induced chemical vapor deposition (FIB-CVD) had been considered to form in a cylindrical double structure. In this structure, the core containing Ga originating from the primary ion is surrounded by an amorphous carbon shell grown by the secondary electrons that were emitted during the inelastic scattering process of the primary ions penetration. We measured the Young's modulus in a series of inclined pillars; the thickness of the pillars was reduced with the inclination. However, the Young's modulus of the inclined pillars of thinner diameter increased. Here, we found that such FIB-CVD pillars had an elastic double structure that is comprised of a very stiffened core with 300 GPa of Young's modulus, and an extremely soft shell having 30 GPa of Young's modulus. We also confirmed that the oxygen plasma thinning of the perpendicular pillars considerably increased the Young's modulus of the FIB-CVD pillars.

Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD

“…The carbon shell is formed by the recoil atoms and the secondary electrons scattered in the pass of Ga implantation. The scattering length of 10 nm agrees well with the thickness of the carbon shell that was shown in the previous study [7]. The distribution of Ga in a DLC pillar was analyzed by using TEM-EDX, which is a useful method for high-resolution observation and analysis of the material composition in a microscopic area.…”

Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor deposition

“…V p was 20 V. Equation (6) is an approximative equation, because the effective mass of cantilever was defined as the mass of part from the supporting part to the center of a cantilever's head. [13][14][15][16][17] Finally, a theoretical fitting curve was drawn using these material characteristics, as shown in Fig. A Young's modulus of 92 GPa calculated using the resonant frequency of the DLC resonator without applied voltage was also used because the Young's modulus of the DLC deposited by FIB-CVD changed due to the conditions of the DLC deposition.…”

“…In addition, DLC deposited by FIB-CVD using phenanthrene (C 14 H 10 ) as a source gas has certain useful functional material characteristics such as a high Young's modulus, [13][14][15][16][17] high density, 13 and piezoresistivity. 11,12 Therefore, we can easily design and fabricate various resonators with a functional mechanical structure.…”

Resonant Mass Detector Based on Carbon Nanowhiskers with Traps for Nanoobjects Weighing

“…The development of nanofabrication techniques led to the creation of a variety of nanoelectromechanical sensors, including nanomechanical oscillators (NMO) . Due to submicron sizes these resonators have low weight and high resonance frequency, which provides high sensitivity and allows to weigh micro‐ and nanoobjects.…”

“…Carbon nanowhiskers (CNW), which could be grown via additive technique based on focused electron beam or ion beam (FEB and FIB) assisted deposition are well suited for measurement of intermediate masses. With help of the mentioned technology CNW with various lateral sizes up to 5 nm could be grown .…”