Selective graphene growth from DLC thin film patterned by focused-ion-beam chemical vapor deposition J. Vac. Sci. Technol. B 29, 06FG04 (2011); 10.1116/1.3655581 Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ionbeam chemical vapor deposition
Small size structures of diamond −like carb 。n ( DLC ) deposiLcd by FIB −CVD cont 目in microscopic non −uniformity in its mechanical properties . 恥 is is mainly duo to cQntaining Ga imp] antcd by G 旦 ion irradiation during dcposition [ 1 ] . In study 正 ng applicatiens of DLC nanostructures to mechanica 且deviceg . , 出 e non −un 面 properties cause dif 五 culties in designing nanomechanica且 dcvices. In Qrder to establis . h a modeling method fbr nanomechani ¢ at device design , precise mechanical property eva [ uation was studied . For the proper 匸 y characterizat 正 on , severa [techniques such as transmission electron microscope ( TEM ) , ion implantation simulation and density measurement by vibration were canied out , Then, an analysis model fbr Finite Element Method ( FEM ) − based dynamic cbaracteristic designing was bu 重 ltup .
Small-sized structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in their mechanical properties. This is mainly due to the structures containing Ga implanted by Ga ion irradiation during deposition [1]. In the application of DLC nanostructures to mechanical devices, the non-uniform properties cause difficulties in designing nanomechanical devices. To establish a modeling method for nanomechanical device design, the precise mechanical properties of DLC pillars were evaluated. For the property characterization, several techniques, such as transmission electron microscopy, ion implantation simulation, and density measurement by vibration, were examined. Then, an analysis model for finite element method-based design of dynamic characteristics was developed.
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