Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor deposition

Kometani, Reo; Nishi, S.; Warisawa, Shin’ichi; Ishihara, Shuji

doi:10.1116/1.3662493

Cited by 4 publications

(3 citation statements)

References 19 publications

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“…The quality factors (Q-factors) of carbon- and tungsten-based nano resonator were estimated to be 100 and 300, respectively, on the basis of the response shown in Figure b,c. Such a low Q-factor than that of previously reported nano resonators indicates possible larger internal energy losses. Nevertheless, after 30 minute operations at the resonance for both nano resonators, no visual degradation was detected and the resonant frequency did not change.…”

Section: Experimental Sectioncontrasting

confidence: 62%

Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam

Chang

Koh

Min

et al. 2013

ACS Appl. Mater. Interfaces

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The synthesis of cantilever-shape nano resonators and their resonant frequency tunings in both upward and downward directions have been demonstrated using FIB-CVD (focused ion beam-chemical vapor deposition). The in situ experimental observations of mechanical resonances as well as cutting and adding of resonator materials have been accomplished inside the FIB vacuum chamber. Extending the length of the cantilever-shape resonator by 500 nm scale using either the same material or alternating different materials effectively reduced resonant frequency. On the other hand, direct cutting and gradual trimming of the end point of nano resonator increases its resonant frequency. This simple yet versatile synthesis and frequency tuning scheme could be applicable to both constructing micro/nano scale resonators and tuning nanostructures with reduced efforts and enhanced efficiency.

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Section: Experimental Sectioncontrasting

confidence: 62%

Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam

Chang

Koh

Min

et al. 2013

ACS Appl. Mater. Interfaces

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“…In recent years, fabrications of various three-dimensional (3D) micro-and nano-structures using focused-ion-beam chemical vapour deposition (FIB-CVD) have been repeatedly demonstrated to be effective for achieving various 3D nanoelectromechanical systems (NEMS) devices [1][2][3][4][5][6][7][8][9]. The nanocantilever structure, which is frequently used as a component in a NEMS device, can be grown by laterally scanning the FIB at the proper speed from the top of the side of a microstructure [10].…”

Section: Introductionmentioning

confidence: 99%

Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition

Guo¹,

Warisawa²,

Ishihara³

et al. 2015

J. Micromech. Microeng.

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Focused-ion-beam chemical vapour deposition (FIB-CVD) has been repeatedly proved to be a useful tool for the growth of three-dimensional (3D) micro- and nano-structures. The strategy of real-time feedback control on FIB-CVD was previously proposed and experimentally demonstrated to be effective for growing ultra-long horizontal nanocantilevers. To fabricate various nanoelectromechanical systems that consist of such types of nanocantilever structures, the mechanical characteristics of ultra-long horizontal nanocantilevers should be investigated. In this study, nanocantilevers with an overhang length of up to 35 μm were grown by using a 30 kV Ga+ FIB, a beam current of 0.50 pA and phenanthrene (C14H10) as the gas source to deposit a diamond-like carbon structure. The Young’s modulus of each nanocantilever was measured by bending the nanocantilever with a nanopillar whose Young’s modulus was known. The average density of each nanocantilever was calculated from the Young’s modulus and the measured resonant frequency. We found that the mechanical characteristics of each nanocantilever depended on the length of the nanocantilever if the strategy of real-time feedback control was applied in fabrication. The Young’s moduli and the averaged densities of the nanocantilevers with a length of 11 to 34 μm were found to be 86 to 254 GPa and 1950 to 5750 kg m−3, respectively. With the increase of the overhang length, the Young’s modulus and the average density were found to gradually increase.

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“…1 It is well known that the sp 2 bonding structure controls the electronic properties and the optical gaps of DLC, while the sp 3 bonding structure controls the mechanical properties. [5][6][7][8][9] The key process in DLC deposition is the formation of sp 3 -C hybridized bonds, which is believed to significantly depend on the energy of the carbon ions, and the optimum energy for sp 3 -C formation is thought to be between 100 and 150 eV per carbon atom. Accordingly, DLC films have been widely used in many industries, such as magnetic and optical disk in data storage, microelectromechanical devices, and biomedical coatings.…”

Section: Introductionmentioning

confidence: 99%

Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source

Dai

Wang

2013

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Articles you may be interested inSuperhard behaviour, low residual stress, and unique structure in diamond-like carbon films by simple bilayer approach J. Appl. Phys. 112, 023518 (2012); 10.1063/1.4739287 Synergism between low-energy neutral particles and energetic ions in the pulsed glow discharge deposition of diamond-like carbon films Electron field-emission from diamond-like carbon films grown by a saddle field fast atom beam source Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering J. Vac. Sci. Technol. A 21, 851 (2003); 10.1116/1.1575231Effects of increasing nitrogen concentration on the structure of carbon nitride films deposited by ion beam assisted deposition Diamond-like carbon (DLC) films were prepared using an anode-layer linear ion beam source with C 2 H 2 as the precursor and various negative bias voltages. The growth properties, microstructures, mechanical properties, and the resistive switching behaviors of the as-deposited DLC films were investigated as a function of bias voltage. The results showed that adjusting the bias voltage could vary the carbon atomic bonding structure (sp 3 /sp 2 carbon hybridized bonding) of the films. The sp 3 /sp 2 ratio initially increased as bias voltage increased and then decreased once the bias voltage exceeded À100 V. The variations in the film hardness and residual stress at different bias voltages were similar in profile to the sp 3 bond fractions, indicating that both the residual stress and the mechanical properties of the DLC films were highly dependent on sp 3 -C bonding structures. The resistive switching characteristics of the DLC films were studied via a Cu/DLC/Pt cell structure. It was found that the bias voltages had a significant influence on the resistive switching behaviors of the DLC films. The film deposited with a bias voltage of 0 V showed excellent resistive switching effects with an ON/OFF ratio higher than 70 and device yield of about 90%, while the films deposited with higher bias voltages presented poor resistive switching effects. The sp 2 /sp 3 ratio of the films was believed to account for the favorable resistive switching performances.

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Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor deposition

Cited by 4 publications

References 19 publications

Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam

Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam

Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition

Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source

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