Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD

Abstract

Small-sized structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in their mechanical properties. This is mainly due to the structures containing Ga implanted by Ga ion irradiation during deposition [1]. In the application of DLC nanostructures to mechanical devices, the non-uniform properties cause difficulties in designing nanomechanical devices. To establish a modeling method for nanomechanical device design, the precise mechanical properties of DLC pillars were evaluated. For the property characterization, several techniques, such as transmission electron microscopy, ion implantation simulation, and density measurement by vibration, were examined. Then, an analysis model for finite element method-based design of dynamic characteristics was developed.