1993
DOI: 10.1063/1.354648
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Determination of bulk states and interface states distributions in polycrystalline silicon thin-film transistors

Abstract: The field-effect conductance activation energy Ea as a function of the gate voltage Vg is investigated for polycrystalline silicon thin-film transistors. An analytical expression for Ea is obtained for various models of the bulk and interface states. Using a computer minimization program to fit the experimental Ea vs Vg data with the theory, the energy distribution of the bulk states and the interface states are separated for nonhydrogenated and hydrogenated polycrystalline silicon thin-film transistors. In bo… Show more

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Cited by 65 publications
(25 citation statements)
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“…7 we can see there is good agreement on both linear and logarithmic scales. This result was found by setting , cm , which is in agreement with the experimentally measured values in [14] and giving the silicon regions a reduced mobility of cm V s. Capture rates and source and drain doping were as given in Table I. …”
Section: Comparison With Experimentssupporting
confidence: 79%
“…7 we can see there is good agreement on both linear and logarithmic scales. This result was found by setting , cm , which is in agreement with the experimentally measured values in [14] and giving the silicon regions a reduced mobility of cm V s. Capture rates and source and drain doping were as given in Table I. …”
Section: Comparison With Experimentssupporting
confidence: 79%
“…In addition, (7) shows that n t follows the MN rule and allows the calculation of n t from E A and S IDS /I gives N' Tmax ≥10 17 cm -3 eV -1 . This value is convenient with previous published results [14].…”
Section: Then It Can Be Expressed Assupporting
confidence: 74%
“…The values chosen are in the range suggested in ref. 27 and are shown in Table I. 3. Simulation of a 400 nm TFT 3.1 Device structure Figure 2 shows the basic device structure we used in the device modelling.…”
Section: Trap State Distribution Modelmentioning
confidence: 99%
“…[20][21][22] or as Gaussian terms used in refs. [26][27][28]. We chose to use Gaussian terms because the studies dealing with SPC films suggest a peak in trap states near the mid gap and we are considering SPC films in this work.…”
Section: Trap State Distribution Modelmentioning
confidence: 99%