2005
DOI: 10.1143/jjap.44.8322
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Simulation Study of the Dependence of Submicron Polysilicon Thin-Film Transistor Output Characteristics on Grain Boundary Position

Abstract: We investigate the impact of varying the grain boundary (GB) position on the output (I d -V d ) characteristics of submicron single GB polysilicon thin film transistors (TFTs), by two-dimensional (2D), drift-diffusion based, device simulation. We employ a localized GB trapping model with a distribution of both donor-like and acceptor-like trap states over the forbidden energy gap of the GB region. We show that for devices with channel lengths in the deep submicron regime, significant variations in output condu… Show more

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Cited by 31 publications
(25 citation statements)
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References 33 publications
(44 reference statements)
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“…To overcome the above problems, in this paper, we demonstrate the possibility of making bipolar transistors on intrinsic recrystallized polycrystalline thin-film silicon without the need for impurity diffusion. Using two-dimensional simulations, similar to that of Walker's approach [16]- [23] for TFTs, we demonstrate the possibility of realizing a polysilicon Bipolar Charge Plasma Transistor (poly-Si BCPT). The proposed device could be suitable for different applications such as the driver circuits of the displays.…”
Section: Introductionmentioning
confidence: 94%
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“…To overcome the above problems, in this paper, we demonstrate the possibility of making bipolar transistors on intrinsic recrystallized polycrystalline thin-film silicon without the need for impurity diffusion. Using two-dimensional simulations, similar to that of Walker's approach [16]- [23] for TFTs, we demonstrate the possibility of realizing a polysilicon Bipolar Charge Plasma Transistor (poly-Si BCPT). The proposed device could be suitable for different applications such as the driver circuits of the displays.…”
Section: Introductionmentioning
confidence: 94%
“…To account for the impact ionization, Selberherr's model is invoked [34]. We have calibrated our models by first reproducing the results for a short channel TFT with a single grain boundary in the channel region as given in [16]. As the TFTs are scaled down to the nano-scale regime, channel length of the TFTs approaches the grain size and it is possible to have a single GB in the re-crystallized silicon film.…”
Section: Device Structure and Parametersmentioning
confidence: 99%
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“…The corresponding computation time is also excessive. Prior work in the literature, in the area of polycrystalline silicon, indicates simulations would be possible with as little as one grain boundary taken along FET channel [48].…”
Section: Multiple Grain Boundary Modelingmentioning
confidence: 99%