Design of MEMS vertical–horizontal chevron thermal actuators

Varona, Jorge; Tecpoyotl-Torres, M.; Hamoui, A.A.

doi:10.1016/j.sna.2009.04.027

Cited by 44 publications

(16 citation statements)

References 6 publications

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“…Sassen, et al, in [5]. The feasibility of implementing vertical thermal actuators based on the chevron topology has been confirmed in [6]. These and other reported applications that include V-beam geometrical type structures in their design are based on the advantages of the actuator in developing high force output in combination with high deformations.…”

Section: A Design Considerationsmentioning

confidence: 88%

Reliability design of thermally actuated MEMS switches supported by V -Beams

Pustan

Chiorean

Bîrleanu

et al. 2015

2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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This paper presents the design and fabrication of the thermally actuated MEMS switches based on out-of-plane Vbeams. The scope of research work is to analyze the mechanical response of a V-thermal actuator fabricated from aluminum in order to improve the accuracy in response and to increase the switches lifetime. The actuation of these switches is based on the static displacement of the mobile electrode under a temperature gradient applied on anchors. It can be used either as a capacitive switch or as a metal-to-metal one. The mobile electrode is moved based on the thermal expansion of the V-beams. The displacement of the mobile electrode under a temperature gradient is analytically and numerically determined. Experimental investigations are performed at macro-scale using a 3D digital image correlation measuring system, a heating source and a thermal camera for accurate temperature monitoring. The manufacturing process of a MEMS device with V-shape beams is also presented in this paper. The out-of-plane V-beams thermal MEMS switches can be monolithically integrated in RF applications.

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Section: A Design Considerationsmentioning

confidence: 88%

Reliability design of thermally actuated MEMS switches supported by V -Beams

Pustan

Chiorean

Bîrleanu

et al. 2015

2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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“…For this purpose we performed electro-thermomechanical simulations in order to obtain the temperature and displacement values during the actuation (FIGURES [3][4][5]. The boundary conditions of the simulations used for experimental thermal actuator were the following: the initial temperature of the whole structure and the temperature of the environment were considered to be T 0 =20 o C and the air convection coefficient was set to 20 W/m 2 K. The material properties settings for the Aluminum were assumed to be: the Young's modulus of 77 GPa, the Poisson's ratio of 0.3, the thermal coefficient of expansion of 2.3×10 -5 K -1 and the thermal conductivity depends on the temperature values [16].…”

Section: Figure 2 the Effects Of The Thermal Expansionmentioning

confidence: 99%

“…They are typically used in MEMS to perform physical functions: to drive micromirrors as a scanner or a switch, to actuate micropumps for microfluidic systems, etc. The popular drive mechanisms employed in microactuators are categorized in four branches: electrostatic, electromagnetic, piezoelectric and thermal expansion [1][2][3]. The most desired characteristics for internal actuators are compatibility with conventional IC technology and large deflection.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a MEMS chevron-type thermal actuator

Baracu

Voicu

Müller

et al. 2015

AIP Conference Proceedings

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“…1 The actuator is a very important part of MEMS device that involves motion. Four principal means including electrostatic forces, 2 3 piezoelectric crystals, 4-7 thermal forces, [8][9][10] and shape memory alloys 11 are commonly used for actuating motions of micro-devices. However, all of them limited by its own disadvantages: high controlling voltage, 12 slow response, 13 poor reliability, 14 and large actuation area.…”

Section: Introductionmentioning

confidence: 99%

A New Method for Measuring the Actuating Pressure of Magnetic Fluid in Magnetic Field

Wu¹,

Liu²

2014

Jnl of Comp & Theo Nano

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By applying a gradient magnetic field, the magnetic fluid flows toward the higher magnetic field region and generated a pressure. This unique property makes it can be used in the field of MEMS actuator. In this work, we have developed a new method to measuring the pressure generated by magnetic fluid which is actuated by magnetic field. An electromagnet has been used to provide a variable magnetic field, and the actuating pressure generated by magnetic field was measured by the micro-force sensor. The calibration experimental results show the device has good measuring linearity and reproducibility. And the actuating pressure of magnetic fluid acquired by this measurement system has a good agreement with theoretical calculations.

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Design of MEMS vertical–horizontal chevron thermal actuators

Cited by 44 publications

References 6 publications

Reliability design of thermally actuated MEMS switches supported by V -Beams

Reliability design of thermally actuated MEMS switches supported by V -Beams

Design and fabrication of a MEMS chevron-type thermal actuator

A New Method for Measuring the Actuating Pressure of Magnetic Fluid in Magnetic Field

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