A New Method for Measuring the Actuating Pressure of Magnetic Fluid in Magnetic Field

Abstract

By applying a gradient magnetic field, the magnetic fluid flows toward the higher magnetic field region and generated a pressure. This unique property makes it can be used in the field of MEMS actuator. In this work, we have developed a new method to measuring the pressure generated by magnetic fluid which is actuated by magnetic field. An electromagnet has been used to provide a variable magnetic field, and the actuating pressure generated by magnetic field was measured by the micro-force sensor. The calibration experimental results show the device has good measuring linearity and reproducibility. And the actuating pressure of magnetic fluid acquired by this measurement system has a good agreement with theoretical calculations.