Design and fabrication of a MEMS chevron-type thermal actuator

Baracu, Angela; Voicu, Rodica; Müller, Raluca; Avram, Andrei; Pustan, Marius; Chiorean, Radu; Bîrleanu, Corina; Dudescu, Cristian

doi:10.1063/1.4908578

Cited by 12 publications

(9 citation statements)

References 7 publications

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“…α is the slanted angle of the V-shaped beams, and d is the distance between adjacent beams. Assuming the temperature change of the beams is Δ T , then the displacement, d e , of the shuttle is readily given by [ 30 ]:

where α 1 is the thermal expansion coefficient (TEC) of the beam material. Figure 5 b shows the temperature distribution of the V-shaped actuator under a DC voltage of 5 V. The structural parameters are shown in Figure 5 a.…”

Section: Electrothermal Action Mechanismsmentioning

confidence: 99%

Review of Electrothermal Micromirrors

Tang

et al. 2022

Micromachines

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Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

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Section: Electrothermal Action Mechanismsmentioning

confidence: 99%

Review of Electrothermal Micromirrors

Tang

et al. 2022

Micromachines

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“…A 1 μm layer of aluminium was deposited using the AUTO 500 evaporation and DC spray system directly on a silicon substrate. Created construction was transferred to the plate using the photolithographic mask [66]. Two sloping uniform beams are joined at the top and attached to the base at the other end.…”

Section: Chevron Type Actuatormentioning

confidence: 99%

Robotic micromanipulation: a) actuators and their application

Bučinskas¹,

Subačiūtė-Žemaitienė²,

Dzedzickis³

et al. 2021

Robot. syst., appl.

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Development of biotechnology and technologies related to small size object position and placement in working area, ensuring desired orientation and fitting during movement into prescribed positions. Paper provides an effort to classify and provide a sorted list of applications in the variety of existing robotic systems to manipulate the object of micrometric size. Extensive development of robotic systems fosters intensive request of accurate and fast drives for robots and manipulators. Paper overviews and specifies a broad spectrum of micrometric scale drives, operating under certain physical effects. These drives are analyzed according to their physical domain, movement mode, stroke or angle range, generated force, speed of movement and other essential drive parameters. The paper concludes a high potential of drives development and points direction to future their application possibilities in microrobotics.

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“…Silicon, polymers, and metals have been extensively used as structural materials for MEMS [30][31][32]. Great thermal conductive metals with low costs, such as aluminum (Al) and copper, have been exploited extensively to manufacture micro-heaters or MEMS devices [32,33].…”

Section: Introductionmentioning

confidence: 99%

“…Aluminum films and aluminum alloys are usually chosen for electronic device applications and include most of the interconnections used in the semiconductor chips [35,36]. MEM devices using pure aluminum as the structural material have rarely been reported [33][34][35][36]. Few studies were found in the literature, and most used aluminum alloys or did not report on the manufacturing and experimental tests of the proposed structures.…”

Section: Introductionmentioning

confidence: 99%

An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization

Voicu

Tibeică

2023

Micromachines

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In this paper, we present the investigations of an aluminum micro-tweezer designed for micromanipulation applications. It includes design, simulation, fabrication, characterizations, and experimental measurements. Electro-thermo-mechanical FEM-based simulations using COMSOL Multiphysics were performed to describe the behavior of the micro-electro-mechanical system (MEMS) device. The micro-tweezers were fabricated in aluminum, as structural material, by surface micromachining processes. Experimental measurements were performed and compared with the simulation results. A micromanipulation experiment was performed using titanium microbeads from 10–30 µm to confirm the performance of the micro-tweezer. This study serves as further research regarding the using of aluminum as structural material for MEMS devices designated for pick-and-place operations.

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Design and fabrication of a MEMS chevron-type thermal actuator

Cited by 12 publications

References 7 publications

Review of Electrothermal Micromirrors

Review of Electrothermal Micromirrors

Robotic micromanipulation: a) actuators and their application

An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization

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