Review of Electrothermal Micromirrors

Tang, Yue; Li, Jianhua; Xu, Lixin; Lee, Jeong; Xie, Huikai

doi:10.3390/mi13030429

Cited by 17 publications

(10 citation statements)

References 87 publications

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“…However, it also has certain disadvantages, due to the limitation of the MEMS process, it can not prepare a torsional structure such as bearings [6] , which leads to the limited torsion Angle of MEMS micromirror, which is very unfavorable for the application end. In addition, there are four driving methods of MEMS torsional mirrors, including electromagnetic drive [7] , electrostatic drive, electric heating drive [8] , and piezoelectric drive [9] . Although the electromagnetic drive has a large torque output, it is difficult to control and has poor stability due to the influence of travel and motion state.…”

Section: Introductionmentioning

confidence: 99%

Design of planar comb-driven MEMS torsional mirror

Nie,

Zhai,

Zhao

2024

J. Phys.: Conf. Ser.

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The MEMS torsional mirror is an important MEMS optical device, and its related applications are very wide, including LiDAR, projection equipment, optical communication, and so on. At present, the electrostatically driven MEMS torsional mirror mainly adopts a vertical comb driver to achieve torsional motion, which has some disadvantages such as a complicated manufacturing process, low yield, and high driving voltage. In this paper, a novel MEMS torsional mirror structure is proposed, which provides flexible elastic constraint points for the torsional mirror with the bottom support rod structure as the center, and relies on the combination of planar comb and support rod to form a tie rod structure to achieve torsion, and achieves a torsion Angle of ±15.55° under the driving voltage of 65 V. The use of a planar comb instead of a vertical comb greatly reduces the difficulty of manufacturing. Finally, it is verified that the system stability is good, the correlation drift does not affect the results within the range, the fifth-order modes are within the reasonable range, and the maximum stress is 671 MPa, which is controlled within the range of fracture stress of silicon material.

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Section: Introductionmentioning

confidence: 99%

Design of planar comb-driven MEMS torsional mirror

Nie,

Zhai,

Zhao

2024

J. Phys.: Conf. Ser.

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“…They are components providing power as a force, moment or movement (Fang et al , 2020; Hu et al , 2019; Lao et al , 2021) . One of them is an electrothermal actuator, which has some feature advantages as: large output force, low driving voltage and simple fabrication (Potekhina and Wang, 2019; Tang et al , 2022). There are three common types of beam shape used for the electrothermal actuators: U-shaped; V-shaped; and Z-shaped (Zhang et al , 2017a, 2017b; Luo, et al , 2005; Zhang et al , 2015).…”

Section: Introductionmentioning

confidence: 99%

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

Nam

Pham²,

Hoang³

2023

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Purpose This paper aims to propose a method to reduce the resistance of silicon-based V-shaped electrothermal microactuator (VEM) by applying a surface sputtering process. Design/methodology/approach Four VEM’s samples have been fabricated using traditional silicon on insulator (SOI)-Micro-electro-mechanical System (MEMS) technology, three of them are coated with a thin layer of platinum on the top surface by sputtering technique with different sputtered times and the other is original. The displacements of the VEM are calculated and simulated to evaluate the advantages of sputtering method. Findings The measured results show that the average resistance of the sputtered structures is approximately 1.16, 1.55 and 2.4 times lower than the non-sputtering sample corresponding to the sputtering time of 1.5, 3 and 6 min. Simulation results confirmed that the maximum displacement of the sputtered VEM is almost 1.45 times larger than non-sputtering one in the range of voltage from 8 to 20 V. The experimental displacements are also measured to validate the better performance of the sputtered samples. Originality/value The experimental results demonstrated the better displacement of the VEM structure after using the platinum sputtering process. The improvement can be considered and applied for enhancing displacement as well as decreasing the driving voltage of the other electrothermal microactuators like U- or Z-shaped structures while combining with the low-cost SOI-MEMS micromachining technology.

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“…For electrothermal actuators, the fabrication is relatively simpler and has better IC compatibility, while the modulation speed or response time is limited that is the main drawback. Therefore, the performance of electrothermal actuator is not good compared to other actuation mechanisms for the use in MEMS scanning micromirror application [32][33][34]. While the electrostatic actuators can meet the demand of modulation speed, response time, and IC compatibility simultaneously.…”

Section: Introductionmentioning

confidence: 99%

Design and Investigation of Dual-Axis Electrostatic Driving MEMS Scanning Micromirror

Wu,

Lin

2023

Preprint

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Micro-electro-mechanical systems (MEMS) are once proposed in 1970s and evolving rapidly. The current researchers are seeking for better designs and better applications of MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with a mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequencies of the slow and the fast axis are 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsional beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.

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Review of Electrothermal Micromirrors

Cited by 17 publications

References 87 publications

Design of planar comb-driven MEMS torsional mirror

Design of planar comb-driven MEMS torsional mirror

Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process

Design and Investigation of Dual-Axis Electrostatic Driving MEMS Scanning Micromirror

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