Abstract:The research and development of silicon-based X-ray fluorescence detectors achieved its submicron sensitivity. Its initial use is intended for in-situ beam monitoring at advanced light-source facilities. The effectively functioning prototype fully leveraged technologies and techniques from a wide array of scientific disciplines: X-ray fluorescence technique, photon scattering and spectroscopy, astronomical photometry, semiconductor physics, materials science, microelectronics, analytical and numerical modellin… Show more
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