Controlled structuring of mica surfaces with the tip of an atomic force microscope by mechanically induced local etching

Abstract

We demonstrate the controlled and reproducible structuring of surfaces of muscovite mica with the tip of an atomic force microscope operated in contact mode under ambient conditions. By repeated scanning of the tip along a predefined pattern on a cleaved mica surface at forces between 100 nN and 4 µN, mechanically induced etching was observed on the atomic scale. Using silicon nitride tips, no tip wear was observed during structuring. No debris was found on the surface as a result of the structuring process, indicating the atomic-scale nature of the wear process. Line widths down to 3 nm were achieved, while at the same time patterns on a wide range of length scales between 5 nm and 100 µm were generated reproducibly. The results can be explained by abrasive wear on the atomic scale due to sliding friction. The experiments allow the study of tribochemistry and abrasive wear on the atomic and molecular scale. At the same time, they represent an approach for high-precision structuring of surfaces within a wide range of length scales.

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