2000 IEEE International SOI Conference. Proceedings (Cat. No.00CH37125)
DOI: 10.1109/soi.2000.892749
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An SOI-based three-dimensional integrated circuit technology

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Cited by 28 publications
(8 citation statements)
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“…However, implementing such an approach requires the density of the vertical interconnection to the top layers to be comparable to that of the via density in the CMOS technology used to implement the LBs and interconnects. Several approaches to chip-and wafer-stacked 3-D integrated circuits (3-D IC) have been recently developed [10], [11]. The vertical via densities achieved by these technologies, however, are several orders of magnitude lower than that of a state-of-the-art CMOS technology, and they are not expected to scale much.…”
Section: A Monolithically Stacked 3-d Fpgamentioning
confidence: 99%
“…However, implementing such an approach requires the density of the vertical interconnection to the top layers to be comparable to that of the via density in the CMOS technology used to implement the LBs and interconnects. Several approaches to chip-and wafer-stacked 3-D integrated circuits (3-D IC) have been recently developed [10], [11]. The vertical via densities achieved by these technologies, however, are several orders of magnitude lower than that of a state-of-the-art CMOS technology, and they are not expected to scale much.…”
Section: A Monolithically Stacked 3-d Fpgamentioning
confidence: 99%
“…In our experiments we used the 3D FPGA architecture of Figure 1(a) where segment lengths of 1, 2, and "long" 4 form the inter-tier routing structure, and segment lengths of 1, 2, 6, and "long" are used within tiers. The delay of an intertier segment is assumed to be equal to that of an intra-tier segment of the same length.…”
Section: Fpga Resultsmentioning
confidence: 99%
“…Consequently, 3D integration can be an enabler for enhancements in system performance, power, reliability, and portability. Advances in industrial [3], government [4] and academic [5] research laboratories have demonstrated 3D designs with inter-tier separations of the order of a few microns. Recently, MIT Lincoln Laboratories has offered a MOSIS-like 3D integration program under the auspices of DARPA.…”
Section: Introductionmentioning
confidence: 99%
“…These techniques vary in terms of their baseline characteristics such as interlayer interconnect lengths and bandwidth, and therefore, in the architectural features that they enable. References [15][16][17][18][19][20][21][22][23] provide a good overview of the current 3D manufacturing techniques. We focus on wafer-and chip-level parallel integration for the rest of the discussion.…”
Section: D Integration Technology: Preliminariesmentioning
confidence: 99%