An Optical In-Plane MEMS Vibration Sensor

Hortschitz, Wilfried; Steiner, Harald; Sachse, M.; Stifter, Matthias; Köhl, F.; Schalko, J.; Jachimowicz, A.; Keplinger, Franz; Sauter, Thilo

doi:10.1109/jsen.2011.2169781

Cited by 27 publications

(15 citation statements)

References 15 publications

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“…The Lock-In amplifier was also used to estimate the electrical noise floor of the opto-electronics while the LED was switched off. Further details of the measurement set-up and the data evaluation can be found in [4] and [2]. The measurement results depicted in Fig.…”

Section: Setup and Resultsmentioning

confidence: 99%

MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

Hortschitz

Kainz

Steiner

et al. 2014

Procedia Engineering

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Section: Setup and Resultsmentioning

confidence: 99%

MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

Hortschitz

Kainz

Steiner

et al. 2014

Procedia Engineering

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“…By now, these two MEMS architectures have been widely been demonstrated for different sensing applications, including the accelerometer, [86][87][88] position sensor, [89,90] acoustic sensor, [91] out-ofplane measurement and in-plane measurements. [92,93]…”

Section: Light Source /Detectormentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

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Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

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“…The displacement of the spring-suspended Si part is read out optically by detecting the light flux modulated by the device [24, 25]. This is achieved by an optical shutter which is composed of a stationary (patterned by Cr deposited on glass) and a moveable aperture array (etched into Si, displaced by F es ) of rectangular holes placed on top of each other (see Fig.…”

Section: Transduction Schemementioning

confidence: 99%

Distortion-free measurement of electric field strength with a MEMS sensor

et al. 2018

Self Cite

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Small-scale and distortion-free measurement of electric fields is crucial for applications such as surveying atmospheric electrostatic fields, lightning research, and safeguarding areas close to high-voltage power lines. A variety of measurement systems exist, the most common of which are field mills, which work by picking up the differential voltage of the measurement electrodes while periodically shielding them with a grounded electrode. However, all current approaches are either bulky, suffer from a strong temperature dependency, or severely distort the electric field requiring a well-defined surrounding and complex calibration procedures. Here we show that microelectromechanical system (MEMS) devices can be used to measure electric field strength without significant field distortion. The purely passive MEMS devices exploit the effect of electrostatic induction, which is used to generate internal forces that are converted into an optically tracked mechanical displacement of a spring-suspended seismic mass. The devices exhibit resolutions on the order of 100(V/m)/Hz with a measurement range of up to tens of kilovolt per metre in the quasi-static regime (≲ 300 Hz).We also show that it should be possible to achieve resolutions of around ∼1(V/m)/Hz by fine-tuning of the sensor embodiment. These MEMS devices are compact and could easily be mass produced for wide application.

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An Optical In-Plane MEMS Vibration Sensor

Cited by 27 publications

References 15 publications

MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

MEMS gratings and their applications

Distortion-free measurement of electric field strength with a MEMS sensor

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