MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

Hortschitz, Wilfried; Kainz, Andreas; Steiner, Harald; Stifter, Matthias; Köhl, F.; Schalko, J.; Sauter, Thilo; Keplinger, Franz

doi:10.1016/j.proeng.2014.11.282

Cited by 13 publications

(5 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Hortschitz W. et.al. [30] developed a set up for MOEMS vibration sensors to operate under low frequencies at ambient air without close loop feedback. They suggested that the sensitivity of the sensor can be increased by adjusting stiffness and mass and simultaneously decreasing the resonance frequency to get more bandwidth for displacement sensing.…”

Section: Applications Of Moemsmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

helix

View full text Add to dashboard Cite

Micro-Opto-Electro-Mechanical Systems (MOEMS) are the combination of Micro-Electro-Mechanical Systems (MEMS) merged with Micro-optics. The precision workings of MEMS, its optical functionality, and fabrication techniques make possible a broad variety of movable and tunable mirrors, filters, and other optical structures. Microoptics has new features that are widely used in many applications than the classical optics. MOEMS contain movable components that have an effect on an optical signal that is pointed towards the surface of this optical component. In this paper, the focus is on MOEMS mirrors, filters, switches and few applications. Additionally, the emphasis is on finding the important and key issues for identification of scope for further work.

show abstract

Section: Applications Of Moemsmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

helix

View full text Add to dashboard Cite

show abstract

“…The displacement of the spring-suspended Si part is read out optically by detecting the light flux modulated by the device [24, 25]. This is achieved by an optical shutter which is composed of a stationary (patterned by Cr deposited on glass) and a moveable aperture array (etched into Si, displaced by F es ) of rectangular holes placed on top of each other (see Fig.…”

Section: Transduction Schemementioning

confidence: 99%

Distortion-free measurement of electric field strength with a MEMS sensor

et al. 2018

View full text Add to dashboard Cite

Small-scale and distortion-free measurement of electric fields is crucial for applications such as surveying atmospheric electrostatic fields, lightning research, and safeguarding areas close to high-voltage power lines. A variety of measurement systems exist, the most common of which are field mills, which work by picking up the differential voltage of the measurement electrodes while periodically shielding them with a grounded electrode. However, all current approaches are either bulky, suffer from a strong temperature dependency, or severely distort the electric field requiring a well-defined surrounding and complex calibration procedures. Here we show that microelectromechanical system (MEMS) devices can be used to measure electric field strength without significant field distortion. The purely passive MEMS devices exploit the effect of electrostatic induction, which is used to generate internal forces that are converted into an optically tracked mechanical displacement of a spring-suspended seismic mass. The devices exhibit resolutions on the order of 100(V/m)/Hz with a measurement range of up to tens of kilovolt per metre in the quasi-static regime (≲ 300 Hz).We also show that it should be possible to achieve resolutions of around ∼1(V/m)/Hz by fine-tuning of the sensor embodiment. These MEMS devices are compact and could easily be mass produced for wide application.

show abstract

“…Folded beam is one of the most common configurations in linear springs. Other examples of folded beam which was developed by W Hortschitz, were used in many MEMS devices, such as vibration sensor, inclination sensor, electric field strength sensor and so on [11][12][13][14][15][16], and most of them have the natural frequency above 100 Hz. Nonlinear springs have been increasingly studied as well, e.g.…”

Section: Introductionmentioning

confidence: 99%

Design and numerical performance analysis of a microgravity accelerometer with quasi-zero stiffness

Duan

Wei

Wang

et al. 2020

Smart Mater. Struct.

View full text Add to dashboard Cite

We report a nonlinear electrothermal-loaded accelerometer for microgravity measurement, achieving quasi-zero stiffness nearby its static equilibrium position. The high mechanical sensitivity is attributed to the compression of the spring, in addition to the geometric parameters matched with quasi-zero stiffness characteristic. To make the spring compressed effectively, a V-shape electrothermal actuator was adopted in the design. The FEA results in multiphysics clearly show the different performance of the accelerometer when it is at applied voltage or not, verifying that the electrothermal-loaded mechanism has an effective influence on the sensitivity of accelerometer. At the applied voltage of 22.3 V, the natural frequency of the accelerometer decreases from 501.95 Hz to 8.24 Hz, while the other two higher mode frequencies remain above 500 Hz. In addition, this mechanism realizes a quasi-zero stiffness approximately of 0.007 N m −1 within a linear working range of ±400 µg and the stiffness becomes larger beyond this range protecting the device being overloaded.

show abstract

MOEMS Vibration Sensor for Advanced Low-frequency Applications with pm Resolution

Cited by 13 publications

References 4 publications

Advances in Development of MOEMS Devices: A Review

Advances in Development of MOEMS Devices: A Review

Distortion-free measurement of electric field strength with a MEMS sensor

Design and numerical performance analysis of a microgravity accelerometer with quasi-zero stiffness

Contact Info

Product

Resources

About