A 3D fiber probe based on orthogonal micro focal-length collimation and fiber Bragg grating

Abstract

A 3D fiber probe is proposed for the precision measurement of micro parts with high aspect ratios. The probing system consists of two measuring systems: two mutually orthogonal micro focal-length collimation optical paths for the radial tactile probing measurement, and a matched fiber Bragg grating (FBG) pair interrogation system for the axial tactile probing measurement. The fiber probe consists of a fiber stylus and a probe tip, the fiber stylus works as a micro focal-length cylindrical lens, and the FBG inscribed in the fiber stylus works as a measuring FBG. The radial displacement of the probe tip is transformed into the centroid position shift of the two mutually orthogonal micro focal-length collimation optical paths; the axial displacement of the probe tip is transformed into the power ratio change of the matched FBG pair interrogation system. Experimental results indicate that the probe has a radial sensitivity of 71 pixel μm −1 in both X and Y directions, and an axial sensitivity of 4.9% μm −1 in Z direction; the probe can reach a radial resolution of 5 nm, and an axial resolution of 8 nm. The probe has a capability of decoupling the 3D tactility and it can be applied in the measurement of micro parts.

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

“…Thus, the hinge-typed microprobe system can perform various functions by combining MEMS and semiconductor technologies and developing a hinge mechanism. The use of the optical fiber has been proposed as a different approach [101][102][103][104][105][106][107][108][109][110][111][112][113]. Figure 5 shows some of the examples.…”

“…For using an optical fiber, the contact of the probe tip to the measured surface is detected by measuring the deflection of the optical fiber stem using the optical method; furthermore, high resolutions are expected for this detection. The probe deflection can be measured with high resolution; however, the reproducibility of detection is difficult to The use of the optical fiber has been proposed as a different approach [101][102][103][104][105][106][107][108][109][110][111][112][113]. Figure 5 shows some of the examples.…”

“…The size of the microprobe system is larger than the abovementioned hinge-type probe because of the optical system [109,110]. Fiber Bragg gratings in an optical fiber can be used to detect the deflection of the fiber as an optical spectrum signal [78,101,102]; furthermore, the use of multiple fibers to simultaneously measure the position and detection direction [104,112] are two interesting examples.…”

A Three-Dimensional Resonant Triggering Probe for Micro-CMM

“…This fiber probe can only achieve 2D measurement. The high aspect ratio fiber probe based on a fiber Bragg grating (FBG) developed by the Harbin Institute of Technology can achieve 3D measurement with a radial resolution of 5 nm and an axial resolution of 8 nm [9,10]. A touch-trigger probe developed by HFUT [11] has a repeatability of better than 5 nm.…”

Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures

“…To achieve extremely high optical path magnification in limited measurement space, a fiber probe based on micro focal-length collimation, in which an optical fiber stylus acts as a micro focal-length cylindrical lens, was proposed in 2010 [ 27 ]. The method was then improved to include 3D measurement capability [ 28 , 29 ]. The probing system is capable of decoupling 3D tactility, but the devices are too complicated to set up.…”