A 3D FEM Model for Heat Transfer Mechanisms in Membrane Based Thermal Conductivity Sensors Developed Using SOI CMOS MEMS Technology

Sarfraz, Sohab; Kumar, R. Vasant; Udrea, F.; Ali, Syed Zeeshan

doi:10.1016/j.proeng.2014.11.395

Cited by 3 publications

(1 citation statement)

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“…Other key advantages of the SOI micro-hotplates are their very low power consumption and high temperature uniformity across the heater sensing area [25]. The use of a commercial CMOS process means that the devices can be fabricated in high volume (millions), at low unit costs.…”

Section: Methodsmentioning

confidence: 99%

Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40)

Stratulat

Serban

Luca

et al. 2015

Sensors

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The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

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Section: Methodsmentioning

confidence: 99%