We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10–80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things.

No abstract

No abstract

The application of plasmonics to thermal emitters is generally assisted by absorptive losses in the metal because Kirchhoff’s law prescribes that only good absorbers make good thermal emitters. Based on a designed plasmonic crystal and exploiting a slow-wave lattice resonance and spontaneous thermal plasmon emission, we engineer a tungsten-based thermal emitter, fabricated in an industrial CMOS process, and demonstrate its markedly improved practical use in a prototype non-dispersive infrared (NDIR) gas-sensing device. We show that the emission intensity of the thermal emitter at the CO2 absorption wavelength is enhanced almost 4-fold compared to a standard non-plasmonic emitter, which enables a proportionate increase in the signal-to-noise ratio of the CO2 gas sensor.

This paper addresses the practical implementation of a wireless sensors network designed to actualize cyber-physical systems that are dedicated to structural health monitoring applications in the construction domain. This network consists of a mesh grid composed of LoRaWAN battery-free wireless sensing nodes that collect physical data and communicating nodes that interface the sensing nodes with the digital world through the Internet. Two prototypes of sensing nodes were manufactured and are powered wirelessly by using a far-field wireless power transmission technique and only one dedicated RF energy source operating in the ISM 868 MHz frequency band. These sensing nodes can simultaneously perform temperature and relative humidity measurements and can transmit the measured data wirelessly over long-range distances by using the LoRa technology and the LoRaWAN protocol. Experimental results for a simplified network confirm that the periodicity of the measurements and data transmission of the sensing nodes can be controlled by the dedicated RF source (embedded in or just controlled by the associated communicating node), by tuning the radiated power density of the RF waves, and without any modification of the software or the hardware implemented in the sensing nodes.