3D free space thermally actuated micromirror device

Singh, Jasveer; Gan, Terence; Agarwal, Ajay; Mohanraj,; Liw, S.

doi:10.1016/j.sna.2005.02.037

Cited by 57 publications

(40 citation statements)

References 13 publications

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“…Submicron scale electrothermal actuators [6] have been proposed as precise end-effectors for robots. Aluminium films on single crystal silicon [7] have been developed for optical applications such as positioning micromirrors. Thermally actuated probe arrays made of gold on silicon nitride were used for nanolithography [8] applications.…”

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confidence: 99%

Materials Selection and Design of Microelectrothermal Bimaterial Actuators

Prasanna

Spearing

2007

J. Microelectromech. Syst.

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Abstract-A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/volume, blocked (force) moment, and free-end (displacement) slope. Results from finite-element analysis and closed form relations agree well to within 1%. The optimal performance for a given pair of materials and the corresponding thickness ratio were determined. Contours of equal performance corresponding to commonly used substrates (e.g., Si, SiO 2 ) were plotted in the domain of governing material properties (thermal expansion coefficient and Young's modulus) to identify candidate materials for further development. These results and the accompanying methodology provide a rational basis for comparing the suitability of "standard" materials for microelectrothermal actuators, as well as identifying materials that might be suitable for further research.[

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confidence: 99%

Materials Selection and Design of Microelectrothermal Bimaterial Actuators

Prasanna

Spearing

2007

J. Microelectromech. Syst.

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“…With the advent of MEMS technologies, many different microactuators have been developed with various actuation mechanisms including electromagnetic [14][15][16][17], electrostatic [18,19], electrothermal [20,21], and piezoelectric actuation [22][23][24]. Although electrostatic actuation is one of the most popular actuation methods, it requires high actuation voltage provided by a high voltage amplifier, which must be, in turn, powered by a high voltage power supply, it suffers from the pull-in phenomenon (saddle-node bifurcation), and it does not provide the displacement measurement capability.…”

Section: Motivation and Objectivesmentioning

confidence: 99%

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

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“…The research of early MEMS scanning device focuses on the imaging, such as the confocal microscopy [2 -7], the bar code recognition [8], the fingerprint recognition [9], etc. Other applications include the optical coherence tomography technique (OCT) [10], the retinal scan display (RSD) [11], printer, head-up display and the laser radar (LIDAR) in the automated production lines [12,13].…”

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confidence: 99%

Optimization and Design of Integrated Space Target

Xue¹

2017

TOEEJ

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Background & Objective:The design and optimization of laser detection system based on MEMS (Micro-electro Mechanical Systems) scanning mirror is presented in the paper. According to requirements of application, it adopts the laser module to design the laser driver circuit, and the designed modulation circuit can satisfy the actual needs. Method:The designed information processing module is composed of the echo receiving module, signal amplification and filter circuit module, and the synchronous circuit of measuring angle and distance, etc. Conclusion:It gives out the distance decoding method and explores the method of capturing echo signal, which can fast and accurately calculate the distance and azimuth information of scanning.

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3D free space thermally actuated micromirror device

Cited by 57 publications

References 13 publications

Materials Selection and Design of Microelectrothermal Bimaterial Actuators

Materials Selection and Design of Microelectrothermal Bimaterial Actuators

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Optimization and Design of Integrated Space Target

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