A novel sensing mechanism for electrostatic MEMS that employs static bifurcation-based sensing and binary detection is demonstrated. It is implemented as an ethanol vapour sensor that exploits the static pull-in bifurcation. Sensor detection of 5 ppm of ethanol vapour in dry nitrogen, equivalent to a detectable mass of 165 pg, is experimentally demonstrated. Sensor robustness to external disturbances is also demonstrated. A closed-form expression for the sensitivity of statically detected electrostatic MEMS sensors is derived. It is shown that the sensitivity of static bifurcation-based binary electrostatic MEMS sensors represents an upper bound on the sensitivity of static detection for given sensor dimensions and material properties.

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

Note: High-efficiency energy harvester using double-clamped piezoelectric beams Rev. Sci. Instrum. 85, 026101 (2014); 10.1063/1.4862820 HfO2 based memory devices with rectifying capabilitiesWe compare the performance of four types of full-wave bridge rectifiers designed for electromagnetic energy harvesters based on silicon diodes, Schottky diodes, passive MOSFETs, and active MOSFETs. Simulation and experimental results show that MOSFET-type rectifiers are more efficient than diode-type rectifiers, reaching voltage and power efficiency of 99% for ideal voltage source with input amplitudes larger than 800 mV. Since active MOSFETs require extra components and an external DC power supply, we conclude that passive MOSFETs are superior for micropower energy harvesting systems. We demonstrate passive MOSFET rectifiers implemented using discrete, off-shelf components and show that they outperform all electromagnetic harvester rectifiers hitherto reported obtaining a power efficiency of 95%. Furthermore, we show that passive MOSFET rectifiers do not affect the center frequency, harvesting bandwidth, or optimal resistance of electromagnetic harvesters. We demonstrate a complete power management module by adding a capacitor to the rectifier output terminal. We found that this configuration changed the optimal resistive load from 40 X to 55 X and decreased output power efficiency to 86%. V C 2014 AIP Publishing LLC. [http://dx.

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.