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A structural model of LiPON solid electrolyte, containing elements that simulate drift conductivity, diffusion conductivity, and leakage current was proposed. The dependence of the impedance of the structural model on frequency was calculated, and the parameters of the model at which the theoretical curve best approximates the experimental Nyquist diagrams were determined. Based on these data, the ion diffusion coefficient and conductivity of LiPON were calculated, which are D1 = 1.5 × 10−11 cm2/s and σ = 1.9 × 10−6 S/cm, respectively.

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