In this research, watt-class green and blue laser diodes, which are fabricated on free-standing semipolar 20 21g f GaN and conventional c-plane GaN substrates, respectively are developed. Although several research groups have recently developed green laser diodes on semipolar GaN substrates, which have weaker piezoelectric fields and higher indium homogeneity in InGaN active regions compared to c-plane GaN, watt-level output power has yet to be achieved. By utilizing the 20 21g f plane, the first watt-class green lasers at 530 nm is successfully fabricated, and achieve maximum output powers in excess of 2 W, which to the best of our knowledge is the highest value reported for any GaN-based green laser diode. A wall-plug efficiency of 17.5% is realized at a current of 1.2 A under continuous-wave operation, which corresponds to an optical output of approximately 1 W and is the highest value reported to date. In addition, high-power and high-efficiency blue laser diodes at 465 nm are successfully fabricated on conventional c-plane GaN substrates. The output power and wall-plug efficiency are 5.2 W and 37.0%, respectively, at a current of 3.0 A under continuous-wave operation. These laser diodes are promising light sources meeting the ITU-R Recommendation BT.2020 for future laser display applications.
We demonstrate a room-temperature continuous-wave operation of green vertical-cavity surface-emitting laser (VCSEL) with a 20 μm long cavity possessing a dielectric curved mirror formed over a {20−21} semi-polar gallium nitride substrate. The emission wavelength and the threshold current were 515 nm and 1.8 mA, respectively. We also confirmed that white light is generated by overlaying three prime colors of light, i.e. red, blue and green, emitted only from VCSEL.
We developed high-power and long-lived AlGaInN-based pure-blue semiconductor lasers emitting in the 440-450 nm wavelength range. The half lifetime (the time for the output power to degrade to half its initial value in constant current mode) was estimated to be more than 10000 hours at a power of 0.75 W under continuous-wave operation at 35°C.Reducing the density of structural defects newly originating from the multiple quantum well active layer and reducing the operating current density were shown to be important for producing high-performance pure-blue lasers.
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