Two different failure modes for a ferroelectric memory cell caused by imprint, the read failure due to the loss of polarization, and the write failure due to the shift of the hysteresis loop are investigated. The quasistatic hysteresis loop allows us to distinguish which failure mode is dominating in a ferroelectric random access memory application and, hence, it can also be used as a powerful tool for lifetime estimation of ferroelectric thin films limited by imprint failure under operating conditions. The experimental results show that the write failure is only decisive for very low voltage operation (Vp<1.25 V), whereas for the Pt/SrBi2Ta2O9/Pt under investigation the read failure is the dominant failure mode for operating voltages exceeding 1.25 V.
The structural interface properties of layered Pt/Ti/SiO 2 /Si electrodes have been investigated using high-resolution specular and diffuse x-ray reflectivity under grazing angles. Currently this multilayer system represents a technological standard as bottom electrodes for ferroelectric thin film applications. For the electronic and ferroelectric properties of integrated devices, the film-electrode interface is of crucial importance.We focused on Pt-100nm/Ti-10nm/SiO 2 /Si electrodes prepared under annealing conditions as employed in industrial processing, prior to the deposition of ferroelectric films. The comparison between annealed and non-annealed electrodes clearly revealed strong interfacial effects due to interdiffusion and oxidation of Ti, especially at the Pt-Ti interface. Migration of Ti into the Pt-layer results in a clear shift of the critical angle due to enclosure of TiO 2-x within the Pt-layer. The heterogeneous distribution of TiO 2-x suggests a diffusion mechanism mainly along the Pt-grain boundaries. At the SiO 2 interface a relatively weakly oxidized, remaining Ti-layer of 20 Å could be found, which is most probably correlated with the remaining adhesion to the substrate.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.