Shrinking feature size and increasing transistor density, combined with the high performance demanded from next-generation microprocessors and other electronic components, have lead to the emergence of severe on-chip “hot spots,” with heat fluxes approaching — and at times exceeding — 1 kW/cm2. The cost-effective thermal management of such chips requires the introduction and refinement of novel cooling techniques. Mini-contact enhanced, miniaturized thermoelectric coolers (TECs) have been shown to be a viable approach for the remediation of on-chip hot spots, but their performance is constrained by the thermal resistance introduced by the attachment of this thermal management device. This paper uses a detailed finite-element package-level model to examine the parasitic effects of the thermal contact resistance (at the interfaces of the mini-contact and TEC) on the cooling efficacy of this thermal solution. Particular attention is devoted to the deleterious effect of contact resistance on the thermoelectric leg height and the mini-contact size required to achieve the greatest hot spot temperature reduction on the chip. Data from experiments with TECs (with a leg height of 130 μm) combined with several sizes of mini-contact pads, are used to validate the modeling approach and the overall conclusions.
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