We present the measurements and theoretical analysis of the deformation and fragmentation of spherical liquid-metal drops by picosecond and subpicosecond laser pulses. In the experiments, 60 μm droplets of Sn-In alloy were irradiated by Ti:Sa laser pulses with a peak energy fluence of ∼100 J cm −2 . The observed evolution of the droplet shape dramatically differs from that previously reported for nanosecond pulses. Invoking 2D hydrodynamic simulations, we explain how, due to the specifics of matter dynamics in the liquid-vapor phase coexistence region, a liquid droplet is transformed into a characteristic acorn-like expanding shell with two inner cavities. High sensitivity of the measured shell parameters to the details of the equation of state and metastable dynamics suggests that such experiments offer new possibilities in exploration of thermophysical properties of metals in the region of liquidvapor phase transition.

Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal from a Si surface. By comparing a-C removal in a surface wave discharge (SWD) plasma and an EUV-induced plasma, the cleaning mechanisms for hydrogen and helium gas environments were determined. The C-atom removal per incident ion was estimated for different sample bias voltages and ion fluxes. It was found that H 2 plasmas generally had higher cleaning rates than He plasmas: up to seven times higher for more negatively biased samples in EUV induced plasma. Moreover, for H 2 , EUV induced plasma was found to be 2-3 times more efficient at removing carbon than the SWD plasma. It was observed carbon removal during exposure to He is due to physical sputtering by He + ions. In H 2 , on the other hand, the increase in carbon removal rates is due to chemical sputtering. This is a new C cleaning mechanism for EUV-induced plasma, which we call "EUV-reactive ion sputtering."

The deformation and fragmentation of liquid metal microdroplets by intense subpicosecond Ti:sapphire laser pulses is experimentally studied with stroboscopic shadow photography. The experiments are performed at a peak intensity of 10^{14}W/cm^{2} at the target's surface, which produces shock waves with pressures in the Mbar range. As a result of such a strong impact, the droplet is transformed into a complex-shaped hollow structure that undergoes asymmetrical expansion and eventually fragments. The hollow structure of the expanding target is explained by the effects of cavitation and spallation that follow the propagation of the laser-induced shock wave.

We report an experimental and numerical investigation of the fragmentation mechanisms of micrometer-sized metal droplet irradiated by ultrashort laser pulses. The results of the experiment show that the fast one-side heating of such a droplet may lead to either symmetric or asymmetric expansion followed by different fragmentation scenarios. To unveil the underlying processes leading to fragmentation we perform simulation of liquid-tin droplet expansion produced by the initial conditions similar to those in experiment using the smoothed particle hydrodynamics (SPH) method. Simulation demonstrates that a thin heated surface layer generates a ultrashort shock wave propagating from the frontal side to rear side of the droplet. Convergence of such shock wave followed by a rarefaction tale to the droplet center results in the cavitation of material inside the central region by the strong tensile stress. Reflection of the shock wave from the rear side of droplet produces another region of highly stretched material where the spallation may occur producing a thin spallation layer moving with a velocity higher than expansion of the central shell after cavitation. It is shown both experimentally and numerically that the threshold laser intensity necessary for the spallation is higher than the threshold required to induce cavitation in the central region of droplet. Thus, the regime of asymmetrical expansion is realized if the laser intensity exceeds the spallation threshold. The transverse and longitudinal expansion velocities obtained in SPH simulations of different regimes of expansion are agreed well with our experimental data. * grigorev@phystech.edu †

We used numerical modeling to study the evolution of EUV-induced plasmas in argon and hydrogen. The results of simulations were compared to the electron densities measured by microwave cavity resonance spectroscopy. It was found that the measured electron densities can be used to derive the integral amount of plasma in the cavity. However, in some regimes, the impact of the setup geometry, EUV spectrum, and EUV induced secondary emission should be taken into account. The influence of these parameters on the generated plasma and the measured electron density is discussed.

Removal of amorphous carbon and tin films from a Mo:Si multilayer mirror surface in a hydrogen plasma and its afterglow is investigated. In the afterglow, the mechanism of Sn and C films removal is solely driven by hydrogen atoms (radicals). Probabilities of Sn and C atoms removal by H atoms were measured. It was shown that the radical mechanism is also dominant for Sn atoms removal in the hydrogen plasma because of the low ion energy and flux. Unlike for Sn, the removal mechanism for C atoms in the plasma is ion-stimulated and provides a much higher removal rate.

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