We present the measurements and theoretical analysis of the deformation and fragmentation of spherical liquid-metal drops by picosecond and subpicosecond laser pulses. In the experiments, 60 μm droplets of Sn-In alloy were irradiated by Ti:Sa laser pulses with a peak energy fluence of ∼100 J cm −2 . The observed evolution of the droplet shape dramatically differs from that previously reported for nanosecond pulses. Invoking 2D hydrodynamic simulations, we explain how, due to the specifics of matter dynamics in the liquid-vapor phase coexistence region, a liquid droplet is transformed into a characteristic acorn-like expanding shell with two inner cavities. High sensitivity of the measured shell parameters to the details of the equation of state and metastable dynamics suggests that such experiments offer new possibilities in exploration of thermophysical properties of metals in the region of liquidvapor phase transition.

The deformation and fragmentation of liquid metal microdroplets by intense subpicosecond Ti:sapphire laser pulses is experimentally studied with stroboscopic shadow photography. The experiments are performed at a peak intensity of 10^{14}W/cm^{2} at the target's surface, which produces shock waves with pressures in the Mbar range. As a result of such a strong impact, the droplet is transformed into a complex-shaped hollow structure that undergoes asymmetrical expansion and eventually fragments. The hollow structure of the expanding target is explained by the effects of cavitation and spallation that follow the propagation of the laser-induced shock wave.

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We report an experimental and numerical investigation of the fragmentation mechanisms of micrometer-sized metal droplet irradiated by ultrashort laser pulses. The results of the experiment show that the fast one-side heating of such a droplet may lead to either symmetric or asymmetric expansion followed by different fragmentation scenarios. To unveil the underlying processes leading to fragmentation we perform simulation of liquid-tin droplet expansion produced by the initial conditions similar to those in experiment using the smoothed particle hydrodynamics (SPH) method. Simulation demonstrates that a thin heated surface layer generates a ultrashort shock wave propagating from the frontal side to rear side of the droplet. Convergence of such shock wave followed by a rarefaction tale to the droplet center results in the cavitation of material inside the central region by the strong tensile stress. Reflection of the shock wave from the rear side of droplet produces another region of highly stretched material where the spallation may occur producing a thin spallation layer moving with a velocity higher than expansion of the central shell after cavitation. It is shown both experimentally and numerically that the threshold laser intensity necessary for the spallation is higher than the threshold required to induce cavitation in the central region of droplet. Thus, the regime of asymmetrical expansion is realized if the laser intensity exceeds the spallation threshold. The transverse and longitudinal expansion velocities obtained in SPH simulations of different regimes of expansion are agreed well with our experimental data. * grigorev@phystech.edu †

This paper reports the basic results that have been obtained at the SRC RF TRINITI (the former Branch of the Kurchatov Institute of Atomic Energy). The work deals with the development of high power discharge produced plasma EUV sources that can meet the requirements of high volume manufacturing lithography tools. Solving the problem of extremely high thermal loads on the electrodes of a EUV source by moving away the electrode surfaces from the plasma and using both multi-discharge systems and rotating Sn-covered disc electrodes is discussed.

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Targeting micrometer sized metal droplets with near-infrared sub-picosecond laser pulses generates intense stress-confined acoustic waves within the droplet. Spherical focusing amplifies their pressures. The rarefaction wave nucleates cavitation at the center of the droplet, which explosively expands with a repeatable fragmentation scenario resulting into high-speed jetting. We predict the number of jets as a function of the laser energy by coupling the cavitation bubble dynamics with Rayleigh-Taylor instabilities. This provides a path to control cavitation and droplet shaping of liquid metals in particular for their use as targets in extreme-UV light sources.

We present the results of the low-melting liquid metal droplets generation based on excited Rayleigh jet breakup. We discuss on the operation of the industrial and in-house designed and manufactured dispensing devices for the droplets generation. Droplet diameter can be varied in the range of 30-90 μm. The working frequency of the droplets, velocity, and the operating temperature were in the ranges of 20-150 kHz, 4-15 m/s, and up to 250 °C, respectively. The standard deviations for the droplet center of mass position both their diameter σ < 1 μm at the distance of 45 mm from the nozzle. Stable operation in the long-term (over 1.5 h) was demonstrated for a wide range of the droplet parameters: diameters, frequencies, and velocities. Physical factors affecting the stability of the generator operation have been identified. The technique for droplet synchronization, allowing using the droplet as a target for laser produced plasma, has been created; in particular, the generator has been successfully used in a high brightness extreme ultraviolet (EUV) light source. The operation with frequency up to 8 kHz was demonstrated as a result of the experimental simulation, which can provide an average brightness of the EUV source up to ∼1.2 kW/mm sr.