Shell-core type TiP2O7-based electrolytes were synthesized by a low-temperature sol-gel method, and their conductivities were investigated by ac-impedance spectroscopy. The samples heat-treated at 500°C showed higher proton conductivities of 3.8 × 10-2 - 1 × 10-2 Scm-1 at intermediate temperatures (100 - 300°C). The conductivity decreased by reheat-treatments at 600°C and 700°C due to a decrease in the amount of the conductive amorphous shells. However, the mechanical strength of the sample pellet significantly increased by the reheat-treatment. The sample reheat-treated at 600°C kept high conductivities of 8.8 × 10-3 - 1 × 10-3 Scm-1 in a range of 100°C - 300°C.
Co is one of the candidates for a new material in the advanced generation of LSI. However, it is difficult to implement a precise analysis of surface reactions because a Co surface is unstable. In chemical mechanical planarization (CMP) and post-CMP cleaning, many surface reactions are simultaneously induced such as dissolving Co by a chelating agent, adhesion of an inhibitor, and oxidation of a Co surface. Those reactions should be controlled to establish the ideal processes of CMP and post-CMP cleaning. In this work, we performed open circuit potential (OCP) monitoring and succeeded in tracing the complicated reactions. It enabled us to compare the strengths of inhibitors and select appropriate inhibitors in a post-CMP cleaner. The measurement and analysis can be applied to not only post-CMP cleaning but also CMP.
ABSTRACT:Permeabilities of oxygen and nitrogen gases were measured for crosslinked poly(vinyl alcohol) and poly(4-vinylpyridine) membranes swollen with aqueous solutions of nonvolatile electrolytes and nonelectrolytes.It was found that the permeabilities of the two gases change characteristically with the water content of the membranes, giving the ratio in the range, 25 to 0. 5 at around O. 3 of the water content.The importance of the hydration layers of the substrate polymers as the permselective field is suggested based on the measurements of DSC and the partition of the nonvolatile compounds for the swollen membranes.Difffusion selectivity and solubility selectivity comprising the permselectivity are discussed. KEY WORDS Gas Permeability/ Polymer Membrane/ Water/ Oxygen/ Nitrogen/ Swelling/ Electrolyte/ Nonelectrolyte / Oxygen Enriching Membrane/ DSC/ Water is a structural liquid. 1 This should have an influence on the permeability of various gases through the solubility and diffusivity.It is well known that addition of electrolytes and nonelectrolytes to water alters the permeability according to intrinsic properties of the solute molecules. 2 With aqueous solution, interactions of gassolvent mixture and local hydrodynamics for the gas diffusion may be essential from the elemental consideration of the permeation process. However, aqueous solution is also a structural medium.Alteration of the water structure by the added solute should also have certain effects on the gas permeability.Because of the lack of proper methods to investigate and hence of the experimental observations, such a viewpoint has never been proved to have reality and has remained as a mere speculation.The present report summarizes our study on the extraordinary permselectivities for oxygen over nitrogen, or nitrogen over oxygen, observed for membrane systems composed of hydrophilic polymer/water/ nonvolatile additives.The basic idea for constructing such systems is that nearby coexistence of polymers and additives, both of which have specific hydrations around themselves, may provide an effective field for selective gas permeation.The polymers so far investigated are 379
3 formulated etchants were prepared and their etch rates were measured using blanket wafers in order to confirm that the etching reactions on Si1-XGeX and Si are controllable. Si1-XGeX selective etching with those formulations was also verified using the wafers which had Si1-XGeX and Si multi-stacked structures. Cross-sectional transmission electron microscope (TEM) images suggested that the formulations were usable for Si1-XGeX selective etching processes.
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