The paper presents a novel approach improve MEMS reliability even during new devices. Firstly, the shock i mechanisms of breakage and stiction are test structures. The obtained results in ter rated loads are compared to acting loads mechanical shock, which are calculated impact model. The model is based superposition approach and can be app designs. It accounts for impacts at flex including stiction as well as for deflections leading to strongly non damping.
Pressure sensors serve a variety of automotive applications, some which may experience high levels of acceleration such as tire pressure monitoring. To design pressure sensors for high acceleration environments it is important to understand their sensitivity to acceleration especially if thick encapsulation layers are used to isolate the device from the hostile environment in which they reside. This paper describes a modeling approach to determine their sensitivity to acceleration that is very general and is applicable to different device designs and configurations. It also describes the results of device testing of a capacitive surface micromachined pressure sensor at constant acceleration levels from 500 to 2000 g's.
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