Design and application of flexible stops for MEMS devices

Naumann, Michael; Mehner, Jan; Lin, David C.; Miller, Todd F.

doi:10.1109/icsens.2010.5690685

Cited by 20 publications

(9 citation statements)

References 4 publications

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“…The overall dimension of the test device is 320 µm x 370 µm which is small in order to maximize the number of devices on a single chip and therefore to increase the level of confidence of the obtained results. Furthermore, damping has been minimized in order to investigate dynamic impacts when critical loads arise primarily due to the deceleration of the proof mass [4]. The damping ratio of dr = 0.018 has been determined by measuring the in-plane decay process (Fig.…”

Section: Test Devicesmentioning

confidence: 99%

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Application of a Prediction Methodology for Mems Reliability in Shock Environments

Naumann¹,

Lin²,

McNeil³

et al. 2012

2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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The paper investigates an approach to predict shock induced failure mechanisms of breakage and stiction at MEMS devices. The approach is applied at two surface micro-machined test devices which are exposed to shock accelerations up to 56,000 g (1 g = 9.81 m/s 2 ). Observed failures are correlated to predicted failures in order to validate the proposed methodology. Predictions are based on a comparison between calculated loads obtained from numerical models and permitted loads of utilized device components. Therefore, a detailed characterization of the applied fabrication technology regarding both failure mechanisms is required. The paper presents a selection of data required to predict failures for both test devices.

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Section: Test Devicesmentioning

confidence: 99%

“…Furthermore, the probability of stiction at travel stops is increased by higher impact forces as demonstrated in [2]. Latest investigations have indicated that an improvement of device reliability is possible by introducing flexible stops to reduce arising impact loads [3], [4].…”

Section: Introductionmentioning

confidence: 99%

Application of a Prediction Methodology for Mems Reliability in Shock Environments

Naumann¹,

Lin²,

McNeil³

et al. 2012

2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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“…A numerical model has been used to calculate acting stiking forces from determined pull out voltages. The impact model can be used to identity design parameters of flexible stops which are applied to limit arising impact forces and, hence, increase the reliability of movable microstructures [16,17]. [18].…”

Section: T ( Fj ( ) Fj ( ))mentioning

confidence: 99%

Recent developments in reduced order modeling based on mode superposition technique

Kolchuzhin

Naumann

Mehner

2011

2011 12th Intl. Conf. On Thermal, Mechanical &Amp; Multi-Physics Simulation and Experiments in Microelectronics and Microsystem

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“…This paper deals with a common load condition of shearing-like loads due to a force component illustrated in Figure 1 a). [1]; b) Broken anchor [2].…”

Section: Introductionmentioning

confidence: 99%

Reliability of anchors at surface micromachined devices in shock environments

Naumann¹,

Dietze

McNeil³

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper presents a methodology to determine the fracture strength of surface micro-machined anchors. First, fracture tests at micro-scale specimens of different anchor size have been performed by a macro-scale load system. Then this fracture data was evaluated statistically applying the Weibull distribution function. It turned out that the statistical theory of brittle material fracture is not completely valid for the applied fabrication technology, as the determined Weibull parameters show a dependency on the anchor size and are therefore not material parameters. Nevertheless, the obtained results can be applied for reliability statements at final MEMS products based on the determined fracture forces and fracture stress.

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Design and application of flexible stops for MEMS devices

Cited by 20 publications

References 4 publications

Application of a Prediction Methodology for Mems Reliability in Shock Environments

Application of a Prediction Methodology for Mems Reliability in Shock Environments

Recent developments in reduced order modeling based on mode superposition technique

Reliability of anchors at surface micromachined devices in shock environments

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