&lt;title&gt;Acceleration sensitivity of micromachined pressure sensors&lt;/title&gt;

August, Richard; Maudie, Theresa; Miller, Todd F.; Thompson, Erik M.

doi:10.1117/12.360508

Cited by 9 publications

(3 citation statements)

References 1 publication

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“…They are inductive, capacitive, strain gauge, and the latest generation of the MEMS family; for example, microscale transducers made with a silicon structure. This group uses piezoresistive or capacitive transducers [11][12][13][14][15][16][17]. In almost all transducer groups, the pressure measurement consists of determining the degree of deformation of the elastic element.…”

Section: Of 15mentioning

confidence: 99%

Sensitivity of Piezoresistive Pressure Sensors to Acceleration

Szczerba

2022

Energies

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The article presents the negative aspects of the influence of static and dynamic acceleration on the accuracy of pressure measurement for a selected type of transmitter. The influence of static accelerations from catalog notes was shown and compared with the tests results for a few selected sensors. The results of research on the influence of dynamic acceleration for various types of its variability for selected converters are presented. Moreover, a method of measurement patented by the authors that uses a complex transducer is shown. The method allows for more accurate measurements on moving objects. The tests were performed based on the proposed method. The obtained results of the influence of acceleration on the classical sensor as well as the construction using the proposed method are shown. The paper presents approximate pressure measurement errors resulting from the influence of acceleration. For example, errors in measuring the speed of an airplane may occur without the proposed method. The last part of the article presents a unique design dedicated to a multi-point pressure measurement system, which uses the presented method of eliminating the influence of accelerations on the pressure measurement.

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Section: Of 15mentioning

confidence: 99%

Sensitivity of Piezoresistive Pressure Sensors to Acceleration

Szczerba

2022

Energies

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“…Silicon based pressure sensors have been proposed by Yang and Chang [5] and August et.al [6]. Some of them use an active sensor with either a battery or a bulky energy transmission.…”

Section: Mems-idt Based Accelerometer and Gyroscope In A Single Chipmentioning

confidence: 99%

<title>Wireless surface acoustic wave and MEMS-based microsensors</title>

Varadan

2001

SPIE Proceedings

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The integration of SAW (Surface Acoustic Wave), MEMS and required microelectronics and conformal antennas to realize programmable microsensors suitable for many engineering and biomedical applications will be presented in this talk. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by a wireless communication system with the advantage of no power requirements at the sensor site (passive sensor). The required features in many of these applications are high precision, wide dynamic range and wide frequency range. MEMS-SAW based devices presented possess typical advantages of MEMS sensors including the additional benefits of robustness, excellent sensitivity, surface conformability and durability. After a brief overview of SAW sensors and MEMS, the paper is focused on the design and fabrication of MEMS devices for a few engineering applications such as accelerometer and gyroscopes for automobile, inertial navigation sensors and tire pressure sensor.

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“…Sensors communicate with display unit via standard RF signals using a battery which will last for 5 years. Silicon based pressure sensors have been proposed by Yang and Chang [1] and August et.al [2]. Wireless systems for tire pressure monitoring have also been reported [3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Design and development of passive MEMS-IDT sensors for continuous monitoring of tire pressure

2001

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In this paper, design and development of polymeric based MEMS-IDT based passive microsensors for continuous monitoring of tire pressure is presented. The sensing system uses SAW sensor mounted on the tire valve stem which is interrogated with an antenna controlled from the dash-board of the car. This unique combination of technologies results in a novel tire pressure sensor that can be remotely sensed by a RF system with the advantage of no power requirements at the sensor site. The sensor presented is simple in construction and easy to manufacture with Microstereo Lithography. The sensors are programmable and can be identified with a bar-code. Thus the technology will not only alert drivers to potential problems, but also will identify which tire is involved.

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<title>Acceleration sensitivity of micromachined pressure sensors</title>

Cited by 9 publications

References 1 publication

Sensitivity of Piezoresistive Pressure Sensors to Acceleration

Sensitivity of Piezoresistive Pressure Sensors to Acceleration

<title>Wireless surface acoustic wave and MEMS-based microsensors</title>

Design and development of passive MEMS-IDT sensors for continuous monitoring of tire pressure

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