Design evaluation of shock induced failure mechanisms of MEMS by correlation of numerical and experimental results

Naumann, Michael; Lin, David C.; Mehner, Jan; McNeil, A.; Miller, Todd F.

doi:10.1109/transducers.2011.5969564

Cited by 4 publications

(5 citation statements)

References 5 publications

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“…Moreover, it must recover from such events without degradation or output shift. Stiction and breakage are two known failure mechanisms associated with MEMS shock failure [5]. Because measurement is performed when the drilling operation is paused, the impact of vibration on gyro-compassing is less a concern.…”

Section: Mems Gyroscope For Mwd Toolmentioning

confidence: 99%

Robust MEMS gyroscope for oil and gas exploration

Lin

Miller

2014

SPIE Proceedings

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To satisfy the performance and reliability requirement of a MEMS based harsh environment sensor, the sensor development needs to depart from the classic method of single-discipline technology improvement. In this paper, the authors will describe a Microsystem-based design methodology which considers simultaneous multiple technology domain interaction and achieves performance optimization at the system level to address the harsh environment sensing challenge. This is demonstrated through specific examples of investigating a robust MEMS gyroscope suitable for high temperature and high vibration environments such as down-hole drilling for Oil and Gas applications. In particular, the different mechanisms of temperature-induced errors in MEMS gyroscope are discussed. The error sources include both the direct impact of the gyroscope dynamics by temperature and the indirect perturbation by temperature-induced package stress. For vibration and shock induced failure, the error contributions from the low frequency and high frequency contents are discussed. Different transducer designs with equivalent rate sensitivity can vary with several orders of magnitude in terms of the susceptibility to mechanical vibration. Also shown are the complex interactions among the gyroscopic transducer, packaging and the control electronics, resulting from these temperature and vibration error sources. The microsystem-based design methodology is able to capture such complex interactions and improve the gyroscope temperature and vibration performance. In contrast to other efforts in harsh environment sensing which focus on specific technology domains, the authors strive to demonstrate the need and advantage of addressing MEMS performance and reliability in harsh environment from a microsystem perspective.

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Section: Mems Gyroscope For Mwd Toolmentioning

confidence: 99%

Robust MEMS gyroscope for oil and gas exploration

Lin

Miller

2014

SPIE Proceedings

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“…A numerical model has been used to calculate acting stiking forces from determined pull out voltages. The impact model can be used to identity design parameters of flexible stops which are applied to limit arising impact forces and, hence, increase the reliability of movable microstructures [16,17]. [18].…”

Section: T ( Fj ( ) Fj ( ))mentioning

confidence: 99%

Recent developments in reduced order modeling based on mode superposition technique

Kolchuzhin

Naumann

Mehner

2011

2011 12th Intl. Conf. On Thermal, Mechanical &Amp; Multi-Physics Simulation and Experiments in Microelectronics and Microsystem

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“…This paper deals with a common load condition of shearing-like loads due to a force component illustrated in Figure 1 a). [1]; b) Broken anchor [2].…”

Section: Introductionmentioning

confidence: 99%

Reliability of anchors at surface micromachined devices in shock environments

Naumann¹,

Dietze

McNeil³

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper presents a methodology to determine the fracture strength of surface micro-machined anchors. First, fracture tests at micro-scale specimens of different anchor size have been performed by a macro-scale load system. Then this fracture data was evaluated statistically applying the Weibull distribution function. It turned out that the statistical theory of brittle material fracture is not completely valid for the applied fabrication technology, as the determined Weibull parameters show a dependency on the anchor size and are therefore not material parameters. Nevertheless, the obtained results can be applied for reliability statements at final MEMS products based on the determined fracture forces and fracture stress.

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Design evaluation of shock induced failure mechanisms of MEMS by correlation of numerical and experimental results

Cited by 4 publications

References 5 publications

Robust MEMS gyroscope for oil and gas exploration

Robust MEMS gyroscope for oil and gas exploration

Recent developments in reduced order modeling based on mode superposition technique

Reliability of anchors at surface micromachined devices in shock environments

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