Automated manipulation of micro-and nanosized objects using robotic setups constitutes a major challenge due to the force-scaling laws and the limited control possibilities on that scale. This paper presents a new developed approach for automated manipulation of individual colloidal particles using a dedicated dualprobe setup inside a scanning electron microscope. Based on tailored probe geometries, the setup allows for reliable pick-up and release sequences of individual particles. Applying image processing of the visual feedback provided by the microscope enables for direct and fast control of the complex manipulation routines and thus allows for fully automated alignment sequences. Experimental results reveal a high repeatability of the process with hitherto unrivaled precision. The advantages and limits of this technique are highlighted with respect to further application scenarios.
Nanorobotic techniques are well-known for characterization and processing of twodimensional materials. However, until now, most of the proposed handling procedures required manual feedback. This article presents an automated handling approach of two-dimensional nanomaterials using a robotic setup inside a high-resolution scanning electron microscope. Applying image processing of the visual feedback provided by the electron microscope, a fully automated sequence is developed to align a robotic driven force sensor with sub-micrometer accuracy and to conduct nanoindentation measurements on a periodically perforated substrate. As an example, this automated sequence is utilized to examine the mechanical properties of a few-layer graphene membrane. The results of the mechanical characterization are compared to Raman spectroscopy data. The article discusses the advantages and restrictions of this technique and responds to further application scenarios.
Micro-and nanosized objects aligned in specific spatial order are of great interest for applications in photonics and nanoelectronics. In particular, piezo-actuated robotic setups are promising tools to arrange and manipulate these objects individually. However, automated robotic processing on the submicron scale remains challenging due to the force scaling laws and the limited possibilities in terms of control. This paper presents the current progress on fully-automated pick-andplace routines of individual colloidal particles using a dedicated dual-probe setup inside a scanning electron microscope. Applying tailored probes in combination with image processing of the visual feedback provided by the microscope allow for complex automation sequences. The limits of the current technique are highlighted and the challenges for automated processing of progressively smaller particles are discussed.
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