Automated robotic manipulation of individual sub-micro particles using a dual probe setup inside the scanning electron microscope

Abstract

Micro-and nanosized objects aligned in specific spatial order are of great interest for applications in photonics and nanoelectronics. In particular, piezo-actuated robotic setups are promising tools to arrange and manipulate these objects individually. However, automated robotic processing on the submicron scale remains challenging due to the force scaling laws and the limited possibilities in terms of control. This paper presents the current progress on fully-automated pick-andplace routines of individual colloidal particles using a dedicated dual-probe setup inside a scanning electron microscope. Applying tailored probes in combination with image processing of the visual feedback provided by the microscope allow for complex automation sequences. The limits of the current technique are highlighted and the challenges for automated processing of progressively smaller particles are discussed.

Probing Friction and Adhesion of Individual Nanoplastic Particles

“…The tip geometry of commercial contact mode AFM probes (BudgetSensors, ContDLC, Bulgaria) was modified by focused ion beam milling to provide optimized adhesion to the spherical NPs. Using a dual-probe nanomanipulation setup inside an SEM environment, ,− the modified probe was brought into contact with an individual preselected NP. During this process, the electron beam was guided to ensure that no electron irradiation reached the interface of interest.…”

Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

“…A high-throughput non-embedded single cell cutting task based on SEM imaging has been performed automatically [ 3 , 4 , 5 ]. In addition, a dedicated dual-probe setup inside SEM can perform automatically complex alignment sequences to reliably pick-up and release sequences of individual colloidal particles (CPs); this technique is highly promising for complex photonic and/or plasmonic structures consisting of individually sorted CPs with synergistic properties [ 6 , 7 ]. Similarly, automated placement of individual silicon nanowires could be used on a micro electromechanical system device to investigate its nanowires’ electromechanical properties [ 8 ].…”

“…To date, a common method of vision-based contact detection has been developed by monitoring the phenomenon that a downward-moving probe slides on the surface of the substrate after contact [ 8 , 15 , 20 ]. This method has been applied in the detection of the contact between the probe and the nanoparticles [ 6 , 7 ]. However, this contact detection method could cause specimen damage during delicate operations; therefore, a non-contact detection method based on 3D imaging formation has been studied.…”