In this paper, the concept and first results of a novel toolbox for nanoscale characterization are presented. A nanorobotic AFM system is being developed and integrated into a high resolution SEM/FIB system allowing nanoanalysis, -manipulation and -structuring. The compact and modular AFM setup enables probe-as well as sample-scanning and uses self-sensing AFM cantilevers. Image fusion algorithms are developed to merge SEM and AFM information for hybrid analysis of nanoscale objects. A commercial AFM controller is embedded into a special control system architecture that allows for automation of nanomanipulation sequences.
Separation and palletizing of microparts is a prerequisite for microhandling and microassembly, especially for components such as microspheres that cannot be efficiently produced and transported in a well-ordered form. Two microrobots equipped with a microgripper and a sharp tungsten tip, respectively, can be effectively utilized to solve this task cooperatively. Based on a powerful visual feedback architecture, the automated palletizing of two different microspheres initially lying in an unordered agglomerated structure is demonstrated. The achieved sorting throughput is in the range of one sphere per second while maintaining a placement accuracy of 3 µm.
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