Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects

Mick, Uwe; Eichhorn, Volkmar; Wortmann, Tim; Diederichs, Claas; Fatikow, Sergej

doi:10.1109/robot.2010.5509414

Cited by 36 publications

(24 citation statements)

References 11 publications

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“…Image processing has been carried out using the image processing environment of MATLAB (Gonzalez et al 2004). The image material has been acquired using a Tescan LYRA 3 FEG=XMH (SEM), a Zeiss LEO 1450 (SEM), and a custom-built AFM setup which can be integrated into the vacuum chamber of the SEMs (Mick et al 2010). All SEM scans are based on the SE detector signal.…”

Section: Resultsmentioning

confidence: 99%

“…In most cases, the equipment provides a more or less accurate estimate of the pixel width in physical units and therefore the difference in scale can be concluded. In an SEM-integrated AFM (Mick et al 2010), typically the difference in orientation between the AFM cantilever and SEM scanning grid is restricted or fixed. In contrast, for successive examinations with changes in the sample mounting the rotation is typically unknown.…”

Section: Feature Matchingmentioning

confidence: 99%

“…In this case, the SEM also helps to guide the AFM cantilever to the designated location. Some effort has been made towards the integration of an AFM inside the vacuum chamber of the SEM (Joachimsthaler et al 2003;Mick et al 2010), where the focus has been on the mechanical setup. In (Wortmann 2009) has been discussed under the viewpoint of visualization.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Registration of AFM and SEM Scans Using Local Features

Wortmann

2011

International Journal of Optomechatronics

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Surface investigations combining the atomic force microscope and scanning electron microscope benefit from the complementarity of both technologies. For the analysis and visualization of a pair of corresponding scans, identifying their spatial alignment is essential. This article presents an automatic registration scheme based on finding correspondences between local image features. The result is then refined by maximizing a similarity measure between the aligned scans. Two feature extraction algorithms have been integrated and tested: Scale-invariant feature transform and speeded-up robust feature. For the experimental evaluation, five types of sample objects showing a variety of different surface structures have been used. The registration scheme succeeds in all application scenarios.

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Section: Resultsmentioning

confidence: 99%

Section: Feature Matchingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Registration of AFM and SEM Scans Using Local Features

Wortmann

2011

International Journal of Optomechatronics

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“…It is mounted on the fine positioning part of a nanorobotic setup (Mick et al 2010). This positioning part is piezo-driven with a build-in capacitive position sensors for closed-loop movement control and high accuracy positioning (Physikinstrumente GmbH).…”

Section: Setupmentioning

confidence: 99%

Vision-Based Haptic Feedback for Remote Micromanipulation in–SEM Environment

Bolopion

Dahmen

Stolle

et al. 2012

International Journal of Optomechatronics

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This article presents an intuitive environment for remote micromanipulation composed of both haptic feedback and virtual reconstruction of the scene. To enable nonexpert users to perform complex teleoperated micromanipulation tasks, it is of utmost importance to provide them with information about the 3-D relative positions of the objects and the tools. Haptic feedback is an intuitive way to transmit such information. Since position sensors are not available at this scale, visual feedback is used to derive information about the scene. In this work, three different techniques are implemented, evaluated, and compared to derive the object positions from scanning electron microscope images. The modified correlation matching with generated template algorithm is accurate and provides reliable detection of objects. To track the tool, a marker-based approach is chosen since fast detection is required for stable haptic feedback. Information derived from these algorithms is used to propose an intuitive remote manipulation system that enables users situated in geographically distant sites to benefit from specific equipments, such as SEMs. Stability of the haptic feedback is ensured by the minimization of the delays, the computational efficiency of vision algorithms, and the proper tuning of the haptic coupling. Virtual guides are proposed to avoid any involuntary collisions between the tool and the objects. This approach is validated by a teleoperation involving melamine microspheres with a diameter of less than 2 l m between Paris, France and Oldenburg, Germany.

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“…State-of-the-art SEM-based nanomanipulation systems are also integrated with AFMs and focused ion beam (FIB) systems, as well as various tools 38 and exchangeable toolboxes 39 . With these advances, powerful nano-laboratories have been established that are capable of simultaneous imaging, fabrication, and nanomanipulation [40][41][42][43] with high efficiency and reproducibility via the use of emerging automation techniques 30,[44][45][46] .…”

Section: Introductionmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects

Cited by 36 publications

References 11 publications

Registration of AFM and SEM Scans Using Local Features

Registration of AFM and SEM Scans Using Local Features

Vision-Based Haptic Feedback for Remote Micromanipulation in–SEM Environment

Recent advances in nanorobotic manipulation inside scanning electron microscopes

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