2016
DOI: 10.1038/micronano.2016.24
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Abstract: A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensiv… Show more

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Cited by 136 publications
(61 citation statements)
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“…In nature, the ability to heal injury increases the survivability and lifetime of most plants and animals. In artificial fields, healing materials after damage or fracture for prolonging their life-span and reducing their costs has a dramatic impact on micro/nano-scopic fields, including biomedicine, [1][2][3][4][5][6] mechanics, [7][8][9][10][11][12] photonics, [13][14][15][16][17][18][19][20][21][22][23] and electronics. [24][25][26][27][28][29][30][31] Healing of microdefects (such as microcracks [32][33][34][35] and microscratches 15,[36][37][38] ) plays an important role in manufacture and maintenance of mechanic, electronic, and photonic micro-devices.…”
mentioning
confidence: 99%
“…In nature, the ability to heal injury increases the survivability and lifetime of most plants and animals. In artificial fields, healing materials after damage or fracture for prolonging their life-span and reducing their costs has a dramatic impact on micro/nano-scopic fields, including biomedicine, [1][2][3][4][5][6] mechanics, [7][8][9][10][11][12] photonics, [13][14][15][16][17][18][19][20][21][22][23] and electronics. [24][25][26][27][28][29][30][31] Healing of microdefects (such as microcracks [32][33][34][35] and microscratches 15,[36][37][38] ) plays an important role in manufacture and maintenance of mechanic, electronic, and photonic micro-devices.…”
mentioning
confidence: 99%
“…Similar KPFM investigation over the length of the NW can be proposed also for vertical or inclined NWs, although the substrate with such NWs must be cleaved and then tilted so that SPM probe would have access to the side surface of the NW instead of solely the NW's metal cap. Potentially, electrical studies of NWs can be done by an SPM probe oriented horizontally [79] but not with vertical standard AFM and STM probe tips. In addition, multiprobe techniques already allow advanced operation with vertical NWs [80], but such measuring stations are nowadays expensive and rare.…”
Section: Electrostatic Surface Potential and Charging Of Horizontal Nwsmentioning
confidence: 99%
“…Micromanipulation has been extensively used in micro-assembly operation, microsurgery, cell operation in biological research, assembly tests and the maintenance of integrated circuits, DNA editing, ion flux measurement, and other fields [1]. Owing to its operation in a microspace, the precision of the operation control is of particular importance.…”
Section: Introductionmentioning
confidence: 99%