Automated Robotic Manipulation of Individual Colloidal Particles Using Vision-Based Control

Abstract

Automated manipulation of micro-and nanosized objects using robotic setups constitutes a major challenge due to the force-scaling laws and the limited control possibilities on that scale. This paper presents a new developed approach for automated manipulation of individual colloidal particles using a dedicated dualprobe setup inside a scanning electron microscope. Based on tailored probe geometries, the setup allows for reliable pick-up and release sequences of individual particles. Applying image processing of the visual feedback provided by the microscope enables for direct and fast control of the complex manipulation routines and thus allows for fully automated alignment sequences. Experimental results reveal a high repeatability of the process with hitherto unrivaled precision. The advantages and limits of this technique are highlighted with respect to further application scenarios.

Processing of Graphene combining Optical Detection and Scanning Probe Lithography

“…Further information on the used components as well as other application scenarios of this robotic platform can be found within our previous work [13]. For control and processing of the multiple sensor information, a special tailored software framework has been applied that has already been described extensively elsewhere [14,15,16].…”

Recent advances in nanorobotic manipulation inside scanning electron microscopes

“…Depth sensing can be achieved using a force sensor to touch a target 69 . Piezoresistive AFM cantilevers have been applied for height estimation 70 . A vibrating piezoelectric bimorph actuator 71 , in which the vibration amplitude decreases upon contact with a substrate or target, was also demonstrated.…”

“…AFM probes and tungsten needles are the most popular end-effectors for nanomanipulation owing to their versatility and commercial availability. A nanomanipulator that is equipped with an AFM probe can perform topography imaging, indentation, stretching, cutting and pushing, pick-and-place operation and assembly, and nanolithography 2,8,40,70 . The AFM cantilever structure can be modified by FIB etching and deposition to create various types of application-specific tools.…”

“…A tungsten nanoprobe and a modified piezoresistive AFM cantilever with a spherical adhesion pocket tip were employed to pick and place the silica spheres 70 . In Figure 5f, a custom nanotip was manipulated by a microgripper to approach an AFM cantilever and subsequently soldered and assembled onto the AFM cantilever tip using EBID to construct a high-aspect-ratio AFM cantilever tip for high-resolution imaging 39 .…”

“…Via visual recognition and vision-based closed-loop control, a nanowire was picked up from the growth substrate and moved for fixation on the MEMS device with EBID. Automated pick-and-place of individual colloidal spheres was realized using two nanoprobes with tailored geometries for cooperative manipulation to form a 3D pyramidal structure via visual servoing and force control 70 . The method did not involve the use of EBID and provided a flexible strategy for 3D nano assembly.…”