With a scanning tunneling microscope (STM) operating in vacuum, we have studied the lithographic patterning of self-assembling organosilane monolayer resist films. Where the organic group is benzyl chloride, the resist layer can be patterned with electrons down to 4 eV in energy. The patterned films have been used as templates for the electroless plating of thin Ni films. Linewidths down to ∼20 nm have been observed in scanning electron micrographs of the plated films. Still smaller features are observed in STM images of the exposed organosilane films.

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ABSTRACT:A new in situ infusion method was used to incorporate small amounts (ϳ 1 wt %) of metal and metal oxide particles into a polymer matrix. Nanosized particles were observed by both transmission electron microscopy and atomic force microscopy. Oxygen (O 2 ) and carbon dioxide (CO 2 ) transport properties of the infused materials were investigated using a dynamic diffusion approach in which both testing and purge gases can be controlled. It was discovered that trace amounts (ϳ 2%) of hydrogen (H 2 ) in the purge gas were sufficient to considerably reduce the O 2 flux of FEP films infused with palladium (Pd) nanoparticles, up to a 200-fold decrease. In contrast, H 2 essentially had no effect on the transport of CO 2 . The generality of the remarkable reduction in oxygen flux was also demonstrated with films of PP, LLDPE, PET, and nylon 6,6 infused with Pd nanoparticles. This oxygen-scavenging effect became more pronounced at lower oxygen concentrations. The catalytic role of Pd in the reaction of O 2 and H 2 and the enormous surface area provided by the dispersed nanoparticles were responsible for this highly efficient oxygen-scavenging effect.

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