PROCESS TECHNOLOGYA novel EEPROM cell structure is roposed, 0.8 pm minimum feature size. The cell fabricated has sufficient cell threshold windows which extend to more than 5 volts and program cell current of more than 80 pA at nominal program voltage of 12 volts. The cell endurance is more than lo4 erase/write cycles. Using this cell structure 4 mega bit full feature EEPROM can be acquired.which realizes a small cell size of 9.72 pn ! by using INTRODUCTION
We propose a microchannel-fin package concept utilizing an AlN passivation layer as the heat spreader and a microchannel fin as an efficient means of heat removal. AlN film has high thermal conductivity and compatibility with the thermal expansion coefficient of Si. A microchannel fin has 4-fold 100 lines of 50 µm×250 µm channels on a 1 cm2 chip. The simulation of dynamic thermal analysis for the new package concept showed that the chip temperature was below 47°C at a power density of 1.5 kW·cm-2 when the liquid-cooled microchannel-fin package was used and below 49°C at 30 W·cm-2 when a compressive-air-cooled microchannel-fin package was used.
Katahira z-L-L, Aoba-ku, Sendai 980, Japan We propose a microchannel fin package utilizing a passivation layer of AIN as the heat spreader and a microchannel fin as the efficient heat removal method. AIN film has high thermal conductivity and compatibility with the thermal expansion coefficient of Si. A microchannel fin has 4 fold 1-00 lines of 50pm x 250pm channels on a Lcm2 chip and is cooled by water coolant. Thermal capability of our new package was evaluated by the simulator of dynamic thermal analysis. We found that the chip temperature was below 47"Ceven at a power density of 1.5kWcm2.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.