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18 O-enriched SiO 2 thin film with the 16 O: 18 O ratio of around 1:1 has been analyzed by laser-assisted atom probe tomography (LA-APT) using 343 nm-wavelength ultraviolet laser or 532 nm-wavelength green laser in order to investigate the quantitativeness of the oxygen concentration determined by LA-APT. No clear evidence for detecting 16 O 18 O ++ signals was found in mass spectra, implying that the peaks at mass/charge of 16 and 18 are dominated by O + , not by O 2 ++. The calculated elemental composition indicated significant loss of oxygen in LA-APT analysis of SiO 2 .

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