2011
DOI: 10.1016/j.ultramic.2011.01.035
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Evaluation of two-dimensional strain distribution by STEM/NBD

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Cited by 54 publications
(42 citation statements)
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“…Likewise in metallic specimens, understanding strain and its evolution under deformation will help further the understanding and predictive capabilities of the field. While many techniques of measuring strain exist [2,3,4,5,6,7,8,9], scanning convergent nanobeam electron diffraction (NBED) is attractive for a number of reasons. First, NBED strain mapping offers the potential of very high accuracy in strain measurement.…”
Section: Introductionmentioning
confidence: 99%
“…Likewise in metallic specimens, understanding strain and its evolution under deformation will help further the understanding and predictive capabilities of the field. While many techniques of measuring strain exist [2,3,4,5,6,7,8,9], scanning convergent nanobeam electron diffraction (NBED) is attractive for a number of reasons. First, NBED strain mapping offers the potential of very high accuracy in strain measurement.…”
Section: Introductionmentioning
confidence: 99%
“…The main advantage is that distances between diffraction spots only depend on the lattice parameter according to Bragg's law [16]. There are different techniques to measure strain using diffraction, e.g., from higher-order Laue zone (HOLZ) lines in convergent-beam electron diffraction (CBED) patterns [17], nano-beam electron diffraction (NBED) [18,19], selected-area diffraction [20] or nano-beam precession electron diffraction [21,22]. In this paper we study the NBED-method proposed by Müller et al [23], which analyzes distances between diffraction reflections.…”
Section: Introductionmentioning
confidence: 99%
“…[79] High-resolution applications of diffraction mapping techniques include local Ge concentration determination in Si/SiGe nanostructures, [80] the evaluation of lattice distortions on InP nanowires containing an axial screw dislocation, [81] and strain mapping in metal oxide semiconductor field-effect transistors (MOSFET) devices. [82,83] In addition, improved grain orientation mapping on polycrystalline materials has been demonstrated by the use of precession-enhanced electron diffraction. [84] Moreover, diffraction analysis on STEM mode currently provides new information on electron-scattering processes of crystalline materials.…”
Section: Diffraction Mappingmentioning
confidence: 99%