A new metallization scheme has been developed for obtaining very low Ohmic contact to n-GaN. The metallization technique involves the deposition of a composite metal layer Ti/Al/Ni/Au (150 Å/2200 Å/400 Å/500 Å) on n-GaN preceded by a reactive ion etching (RIE) process which most likely renders the surface highly n type. Of the several attempts and with annealing at 900 °C for 30 s, contacts with specific resistivity values of ρs=8.9×10−8 Ω cm2 or lower for a doping level of 4×1017 cm−3 were obtained. The physical mechanism underlying the realization of such a low resistivity is elucidated.

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Compact and efficient sources of blue light for full color display applications and lighting eluded and tantalized researchers for many years. Semiconductor light sources are attractive owing to their reliability and amenability to mass manufacture. However, large band gaps are required to achieve blue color. A class of compound semiconductors formed by metal nitrides, GaN and its allied compounds AIGaN and InGaN, exhibits properties well suited for not only blue and blue-green emitters, but also for ultraviolet emitters and detectors. What thwarted engineers and scientists from fabricating useful devices from these materials in the past was the poor quality of material and lack of p-type doping. Both of these obstacles have recently been overcome to the point where highluminosity blue and blue-green light-emitting diodes are now available in the marketplace.

Transmission electron microscopy has been applied to characterize the structure of Ti/Al and Ti/Al/Ni/Au Ohmic contacts on n-type GaN (∼1017 cm−3) epitaxial layers. The metals were deposited either by conventional electron-beam or thermal evaporation techniques, and then thermally annealed at 900 °C for 30 s in a N2 atmosphere. Before metal deposition, the GaN surface was treated by reactive ion etching. A thin polycrystalline cubic TiN layer epitaxially matched to the (0001) GaN surface was detected at the interface with the GaN substrate. This layer was studied in detail by electron diffraction and high resolution electron microscopy. The orientation relationship between the cubic TiN and the GaN was found to be: {111}TiN//{00.1}GaN, [110]TiN//[11.0]GaN, [112]TiN//[10.0]GaN. The formation of this cubic TiN layer results in an excess of N vacancies in the GaN close to the interface which is considered to be the reason for the low resistance of the contact.

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