In this paper, an enhanced compact model of multiwalled carbon nanotube (MWCNT) interconnects while considering defects and contact resistance is proposed. Based on the atomistic-level simulations, we have found that defect densities impact MWCNT resistance and ultimately their electrical performance. Furthermore, we have computed by atomisticlevel simulations the end-contact resistance between single-wall carbon nanotube (SWCNT) and Palladium (Pd) electrode to mimic the Pd-CNT end-contact resistance of each CNT shell in MWCNT. We have developed an advanced shell-by-shell model to include various parameters such as shell diameter, shell chirality, defects on each shell, and connectivity of each shell to endcontacts. We run Monte Carlo simulations to perform variability studies on each of these parameters to understand the electrical performance variation on MWCNT interconnects. We present simulation results to convey the critical impact of variations. The impact of doping on MWCNT variability in the form of Fermi level shift will be addressed in Part II of this paper.
This article is a review of the current progress and results obtained in the European H2020 CONNECT project. Amongst all the research on carbon nanotube interconnects, those discussed here cover 1) process & growth of carbon nanotube interconnects compatible with back-end-of-line integration, 2) modeling and simulation from atomistic to circuit-level benchmarking and performance prediction, and 3) characterization and electrical measurements. We provide an overview of the current advancements on carbon nanotube interconnects and also regarding the prospects for designing energy efficient integrated circuits. Each selected category is presented in an accessible manner aiming to serve as a review and informative cornerstone on carbon nanotube interconnects.
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