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This paper discusses the modeling, design and realization of micromachined Coriolis mass flow sensors. A lumped element model is used to analyze and predict the sensor performance. The model is used to design a sensor for a flow range of 0-1.2 g h −1 with a maximum pressure drop of 1 bar. The sensor was realized using semi-circular channels just beneath the surface of a silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. Special comb-shaped electrodes are integrated on the channels for capacitive readout of the extremely small Coriolis displacements. The comb-shaped electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods. Furthermore, it prevents squeezed film damping due to a thin layer of air between the capacitor electrodes. As a result, the sensor operates at atmospheric pressure with a quality factor in the order of 40 and does not require vacuum packaging like other micro Coriolis flow sensors. Measurement results using water, ethanol, white gas and argon are presented, showing that the sensor measures true mass flow. The measurement error is currently in the order of 1% of the full scale of 1.2 g h −1 .

We present a monolithic device obtained by carving a cantilever on the top of a single-mode optical fiber. We show that the vertical position of the cantilever can be determined with accuracy comparable to atomic force microscopes and other commonly used scientific instruments. The device does not require any alignment procedure and can be used in critical environments as well as in standard applications.

Ignition of exothermic chemical reactions in small volumes is considered as difficult or impossible due to the large surface-to-volume ratio. Here observation of the spontaneous reaction is reported between hydrogen and oxygen in bubbles whose diameter is smaller than a threshold value around 150 nm. The effect is attributed to high Laplace pressure and to fast dynamics in nanobubbles and is the first indication on combustion in the nanoscale. In this study the bubbles were produced by water electrolysis using successive generation of H(2) and O(2) above the same electrode with short voltage pulses in the microsecond range. The process was observed in a microsystem at current densities >1000 A/cm(2) and relative supersaturations >1000.

Water electrolysis in a microsystem is observed and analyzed on a short-time scale of ∼10 μs. The very unusual properties of the process are stressed. An extremely high current density is observed because the process is not limited by the diffusion of electroactive species. The high current is accompanied by a high relative supersaturation, S > 1000, that results in homogeneous nucleation of bubbles. On the short-time scale only nanobubbles can be formed. These nanobubbles densely cover the electrodes and aggregate at a later time to microbubbles. The effect is significantly intensified with a small increase of temperature. Application of alternating polarity voltage pulses produces bubbles containing a mixture of hydrogen and oxygen. Spontaneous reaction between gases is observed for stoichiometric bubbles with sizes smaller than ∼150 nm. Such bubbles disintegrate violently affecting the surfaces of the electrodes.