Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor

Haneveld, Jeroen; Lammerink, Theodorus S.J.; Boer, de M.J.; Sanders, Remco G.P.; Mehendale, Aditya; Lötters, Joost Conrad; Dijkstra, Marcel; Wiegerink, Remco J.

doi:10.1088/0960-1317/20/12/125001

Cited by 71 publications

(110 citation statements)

References 13 publications

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“…Details on the fabrication process and sensor detection principles can be found in [11,12]. Both the thermal and Coriolis sensors consist of a silicon nitride tube with a wall thickness of roughly 1 μm.…”

Section: Mems Sensormentioning

confidence: 99%

Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

et al. 2015

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Abstract:In this paper we describe the development of a system and model to analyze the composition of gas mixtures up to four components. The system consists of a Coriolis mass flow sensor, density, pressure and thermal flow sensor. With this system it is possible to measure the viscosity, density, heat capacity and flow rate of the medium. In a next step the composition can be analyzed if the constituents of the mixture are known. This makes the approach universally applicable to all gasses as long as the number of components does not exceed the number of measured properties and as long as the properties are measured with a sufficient accuracy. We present measurements with binary and ternary gas mixtures, on compositions that range over an order of magnitude in value for the physical properties. Two platforms for analyses are presented. The first platform consists of sensors realized with MEMS fabrication technology. This approach allows for a system with a high level of integration. With this system we demonstrate a proof of principle for the analyses of binary mixtures with an accuracy of 10%. In the second platform we utilize more mature steel sensor technology to demonstrate the potential of this approach. We show that with this technique, binary mixtures can be measured within 1% and ternary gas mixtures within 3%. OPEN ACCESSMicromachines 2015, 6 453

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Section: Mems Sensormentioning

confidence: 99%

Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

et al. 2015

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“…Details can be found in [4]. To protect the relatively fragile Coriolis tube a glass cover is glued on top of the chip.…”

Section: Chip and Packagingmentioning

confidence: 99%

“…This places strong demands on the detection part which is done using electrostatic comb structures [4]. Here displacement of the tube causes a change in capacitance that is transformed into a voltage change.…”

Section: Electronicsmentioning

confidence: 99%

Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor

et al. 2013

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Abstract:In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m 3 /kg.

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“…Transducer structures can be integrated in close proximity to the fluid using suitable materials. Commonly used actuation and read-out methods that can be combined in this platform are thermal, Lorentz force and electrostatic actuation Haneveld et al 2010;Wiegerink et al 2011;Droogendijk et al 2012) and optical, resistive and capacitive read-out (Haneveld et al 2008;Lötters et al 2013;Haneveld et al 2009). The fabrication uses process steps that can easily be transferred to a MEMS foundry, enabling easy upscaling.…”

Section: Introductionmentioning

confidence: 99%

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Groenesteijn

Boer

Lötters

et al. 2017

Microfluid Nanofluid

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often have to be connected using (external) fluidic interconnects. This way, the fluidic interconnects will have a relatively large volume, resulting in slow response times and requiring large sample sizes.To make the ideal integrated microfluidic handling system, one fabrication process should allow many different microfluidic devices for all kinds of applications to be integrated on the same chip. The functional channels of the devices, the interconnect channels and the required interfacing electronics should be integrated on the same substrate without restricting the design options for each device.Different applications pose different demands on the fabricated system. To avoid leakage and wear, the channel walls should be mechanically strong, chemically inert and leak tight for both liquids and gasses in a large temperature range. It should be possible to locally release the channel (completely or partially) from the substrate, e.g. for thermal isolation or freedom of movement. It is required to integrate transducer structures for actuation and measurement of the devices. This can be anything from metal tracks to piezoelectric or magnetic materials or optical waveguides. Functionalization of the inside of the channel, e.g. with a catalyst or with specific coatings for (bio)chemical reactions or adhesion should be possible. Multiple channels should be able to cross each other or run inside each other. Interface electronics should be integrated directly on the chip or package to reduce noise and other parasitic effects.To be able to transfer proof-of-concepts to commercial devices, it should not only be possible to fabricate low-volume research devices, but it should also be possible to scale up the fabrication to industrial low-cost, high-volume processing in foundries. Last, and certainly not least, it should be straightforward to design the optimal fluidic element with respect to shape and size, for any application. AbstractMany microfluidic devices are made using specialized fabrication processes, limiting the ability to integrate those devices on the same chip. In this paper, a versatile technology platform is presented that allows for integration of many different devices. It provides a method to design channels in a wide range of sizes and shapes with different functionalization options in close proximity to the fluid in the channels. The latter includes release of the channels for thermal isolation or mechanical movement and metal or piezoelectric layers for actuation and read-out. The channel walls are made using silicon-rich silicon nitride to provide durable, strong, chemically inert and thermally stable channels directly below the substrate surface .

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Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor

Cited by 71 publications

References 13 publications

Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor

A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

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