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A new design for a silicon-based micropump is described. Passive cantilever valves are produced by boron etch stop and fusion bonding. Tests of these valves show good performance, as no flow could be detected in the reverse direction. Initial experiments on a thick-film screen printed piezoelectric membrane actuator were undertaken. A study of suitable inks for electrodes on different insulation layers on silicon yielded silicon dioxide and cermet gold ink as the most satisfactory combination. Deflection measurements of a mm PZT (lead zirconate titanate) - bimorph membrane gave movement at an applied voltage of 100 V. A quasi-static simulation package of the flow through a micropump is also presented. The valve action is simulated using ANSYS coupled with FLOW3D. The piezoelectric membrane deflection is simulated with ANSYS. A differential equation for the combined actuation of membrane and valves is solved numerically with Maple. Pump rates of up to and a maximum backpressure of up to 70 kPa for a driving voltage of 40 V have been modelled using bulk values for PZT-5H. A pump rate of up to and a maximum backpressure of up to 35 kPa at 100 V driving voltage are predicted using thick-film parameters extracted from the measurements.

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Due to the high energy of extreme ultraviolet (EUV) photons, stochastic effects become more important at a constant dose when compared with deep ultraviolet exposures. Photoresists are used to transfer information from the aerial image into physical features and play an important role in the transduction of these stochastic effects. Recently, metal-oxide-based nonchemically amplified resists (non-CARs) have attracted a lot of attention. We study how the properties of these non-CARs impact the local critical dimension uniformity (LCDU) of a regular contact hole array printed with EUV lithography using Monte Carlo simulations and an analytical model. We benchmark both the simulations and the analytical model to experimental data, and then use the flexibility of both methods to systematically investigate the role of microscopic resist properties in the final LCDU. It is found that metal-oxide clusters should be <1 nm in diameter, otherwise granularity will have a significant contribution to LCDU. When varying resist properties to change the resist dose-to-size, we find that the LCDU scaling with dose depends on how the resist is modified. After performing an overall sensitivity analysis to identify the optimum scaling of LCDU with dose, we find a scaling of dose −0.5 when the development threshold is modified, and a scaling of dose −0.33 when core radius or the quantum efficiency is changed.

We study the propagation of light in a three-dimensional double-periodic Ag/TiO 2 multilayer metamaterial composed of coupled plasmonic waveguides operating in the visible and UV spectral range. For these frequencies, light propagation in the plane of the waveguides is described by a negative phase velocity, while for the orthogonal direction light propagation is described by a Bloch wave composed of a large number of harmonics. As a result, the material cannot generally be described by a single phase index: decomposing the Bloch wave into different harmonics we show that for the wavelength range of interest the positive index m=1 harmonic dominates the propagation of light in the orthogonal direction. These results are corroborated by numerical simulations and optical refraction experiments on a double-periodic Ag/TiO 2 multilayer metamaterial prism in the 380-600 nm spectral range, which show that positive refraction associated with right-handed harmonics dominates. Studying the isofrequency contours we find that despite the occurrence of multiple harmonics the double-periodic structure can act as a flat lens: for a slab consisting of an integer number of unit cells all harmonics are degenerate and constructively interfere at the image plane. This work identifies important considerations relevant to the design of many three dimensional periodic metamaterials.

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