We demonstrate an ultra-high-bandwidth Mach-Zehnder electro-optic modulator (EOM), based on foundry-fabricated silicon (Si) photonics, made using conventional lithography and wafer-scale fabrication, oxide-bonded at 200C to a lithium niobate (LN) thin film. Our design integrates silicon photonics light input/output and optical components, such as directional couplers and low-radius bends. No etching or patterning of the thin film LN is required. This hybrid Si-LN MZM achieves beyond 106 GHz 3-dB electrical modulation bandwidth, the highest of any silicon photonic or lithium niobate (phase) modulator.

Mach-Zehnder electro-optic modulators (EOM) based on thin-film lithium niobate bonded to a silicon photonic waveguide circuit have been shown to achieve very high modulation bandwidths. Open eye-diagram measurements made in the time domain of beyond-small-signal modulation are used to support the modulation-sideband measurements in showing that such EOM’s can support high-frequency modulations well beyond 100 GHz.

We demonstrate a photonic waveguide technology based on a two-material core, in which light is controllably and repeatedly transferred back and forth between sub-micron thickness crystalline layers of Si and LN bonded to one another, where the former is patterned and the latter is not. In this way, the foundry-based wafer-scale fabrication technology for silicon photonics can be leveraged to form lithium-niobate based integrated optical devices. Using two different guided modes and an adiabatic mode transition between them, we demonstrate a set of building blocks such as waveguides, bends, and couplers which can be used to route light underneath an unpatterned slab of LN, as well as outside the LN-bonded region, thus enabling complex and compact lightwave circuits in LN alongside Si photonics with fabrication ease and low cost.

The past decade has seen significant growth in the field of thin film lithium niobate electro-optic modulators, which promise reduced voltage requirements and higher modulation bandwidths on a potentially integrated platform. This article discusses the state-of-the-art in thin film modulator technology and presents a simplified simulation technique for quickly optimizing a hybrid silicon- or silicon nitride-lithium niobate modulator. Also discussed are the feasibility of creating a 1 V half-wave voltage, 100 GHz bandwidth modulator, and the design specifications for a single hybrid silicon-lithium niobate platform optimized to operate across all telecommunication bands (between 1260 and 1675 nm wavelengths).

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