2018
DOI: 10.1364/oe.26.023728
|View full text |Cite
|
Sign up to set email alerts
|

Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth

Abstract: We demonstrate an ultra-high-bandwidth Mach-Zehnder electro-optic modulator (EOM), based on foundry-fabricated silicon (Si) photonics, made using conventional lithography and wafer-scale fabrication, oxide-bonded at 200C to a lithium niobate (LN) thin film. Our design integrates silicon photonics light input/output and optical components, such as directional couplers and low-radius bends. No etching or patterning of the thin film LN is required. This hybrid Si-LN MZM achieves beyond 106 GHz 3-dB electrical mod… Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

3
159
0

Year Published

2019
2019
2023
2023

Publication Types

Select...
9
1

Relationship

0
10

Authors

Journals

citations
Cited by 268 publications
(162 citation statements)
references
References 57 publications
3
159
0
Order By: Relevance
“…An alternative approach, i.e., hybrid integration of LN membranes onto SOI PICs, has also attracted considerable interests [43][44] . The hybrid silicon/LN material system combines the scalability of silicon photonics with excellent modulation performance of LN.…”
mentioning
confidence: 99%
“…An alternative approach, i.e., hybrid integration of LN membranes onto SOI PICs, has also attracted considerable interests [43][44] . The hybrid silicon/LN material system combines the scalability of silicon photonics with excellent modulation performance of LN.…”
mentioning
confidence: 99%
“…In this work, we report generation of Kerr solitons in high-Q lithium niobate resonators. Lithium niobate (LN) (both in bulk form and when fabricated into waveguides and resonators) is of considerable interest for its versatile properties including the electro-optic as well as second and third-order nonlinear optical effects [23][24][25][26][27][28][29][30][31][32]. And the combining of these properties with stable soliton mode locking significantly amplifies the functionality of soliton microcombs.…”
mentioning
confidence: 99%
“…In recent years, photonic devices based on LNOI, including waveguides [6,7], microring resonators [1,8], microdisk resonators [9][10][11], and photonic crystal cavities [12,13] have been developed. On-chip functionalities, such as second harmonic generation [13][14][15][16][17][18], electro-optic modulator [3,[19][20][21][22][23], and optical frequency comb [24,25], have experienced rapid progress with the above-mentioned LNOI micro-/nanodevices. Importantly, many integrated on-chip lithium niobate (LN) devices developed recently already feature low propagation losses [6][7][8]10], which is critical for practical applications.…”
Section: Introductionmentioning
confidence: 99%